Preparation and characterization of advanced thin gate dielectric films for VLSI devices

Student thesis: Master's Thesis

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Author(s)

  • Tin Fong HUNG

Related Research Unit(s)

Detail(s)

Awarding Institution
Supervisors/Advisors
  • Yiu Chung CHENG (Supervisor)
  • Hei WONG (Co-supervisor)
Award date31 Aug 1993

Link(s)

Permanent Link https://scholars.cityu.edu.hk/en/theses/theses(7b262f06-71ed-467b-b3d5-efdcbdb5585e).html
Other link(s)

Links

    Research areas

  • Dielectric films, Integrated circuits, Very large scale integration