Plasma immersion ion implantation of inner surfaces and semiconductor

內表面和半導體的等離子體浸沒式離子注入

Student thesis: Doctoral Thesis

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Author(s)

  • Xuchu ZENG

Detail(s)

Awarding Institution
Supervisors/Advisors
Award date31 Jul 2001

    Research areas

  • Effect of radiation on, Semiconductor doping, Ion implantation, Semiconductors