Hybrid ion implantation/nitriding and cathodic arc plasma implantation/deposition in an immersion configuration

複合的等離子體浸沒離子注入/氮化與陰極弧注入/沉積

Student thesis: Doctoral Thesis

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Author(s)

  • Xiubo TIAN

Detail(s)

Awarding Institution
Supervisors/Advisors
Award date2 Oct 2002

    Research areas

  • Ion implantation, Plasma (Ionized gases), Industrial applications, Ion bombardment