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SOI synthesis by plasma immersion ion implantation

  • Zhineng FAN

    Student thesis: Doctoral Thesis

    Date of Award30 Oct 1998
    Original languageEnglish
    Awarding Institution
    • City University of Hong Kong
    SupervisorPaul Kim Ho CHU (Supervisor)

    Keywords

    • Plasma (Ionized gases)
    • Ion implantation
    • Silicon-on-insulator technology

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