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Hybrid ion implantation/nitriding and cathodic arc plasma implantation/deposition in an immersion configuration

  • Xiubo TIAN

    Student thesis: Doctoral Thesis

    Date of Award2 Oct 2002
    Original languageEnglish
    Awarding Institution
    • City University of Hong Kong
    SupervisorPaul Kim Ho CHU (Supervisor)

    Keywords

    • Ion implantation
    • Plasma (Ionized gases)
    • Industrial applications
    • Ion bombardment

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