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Deposition of nanocrystalline diamond films on silicon by microwave inert gas--methane plasma CVD

  • Cheng Hao LEE

    Student thesis: Doctoral Thesis

    Date of Award14 Feb 2003
    Original languageEnglish
    Awarding Institution
    • City University of Hong Kong
    SupervisorShuit Tong LEE (Supervisor)

    Keywords

    • Diamond thin films
    • Nanocrystals
    • Plasma-enhanced chemical vapor deposition
    • Methane

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