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Deposition of high orientation diamond films on silicon substrates by microwave plasma CVD

  • Chao SUN

    Student thesis: Doctoral Thesis

    Date of Award15 Oct 1999
    Original languageEnglish
    Awarding Institution
    • City University of Hong Kong
    SupervisorShuit Tong LEE (Supervisor)

    Keywords

    • Diamond thin films
    • Diamonds, Artificial

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