Zinc and group V element co-implantation in indium phosphide

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Original languageEnglish
Pages (from-to)65-71
Journal / PublicationNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume168
Issue number1
Publication statusPublished - May 2000
Externally publishedYes

Abstract

Group V elements with mass ranging from 35 to 122 amu have been co-implanted with Zn in InP substrates. Co-implantation with all group V elements drastically reduced Zn out-diffusion and to a certain extent also inhibited Zn in-diffusion. The reduction in out-diffusion was insensitive to the group V element mass and thus, to implantation-induced damage. We believe the group V element excess created an In-vacancy excess that enhanced Zn substitution into the In sublattice. A maximum hole concentration of 7×1018 cm-3 was achieved with P co-implantation. Electrochemical capacitance-voltage profiling clearly showed a decrease in hole concentration as a function of increasing group V element mass. This was attributed to differences in compensating residual implantation-induced damage.