XTEM Study of Ni Gettering to H-Implantation-Induced Cavities in SOI Material

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	XIIIth International Conference on Ion Implantation Technology (IIT2000)
Subtitle of host publication	ABSTRACTS
Publication status	Published - Sept 2000
Event	XIIIth International Conference on Ion Implantation Technology (IIT2000) - Alpbach, Austria Duration: 17 Sept 2000 → 22 Sept 2000

Conference	XIIIth International Conference on Ion Implantation Technology (IIT2000)
Abbreviated title	IIT2000
Place	Austria
City	Alpbach
Period	17/09/00 → 22/09/00

Other Access Options

@inproceedings{d5ff6b44c83440ffa574d07a1935570a,

title = "XTEM Study of Ni Gettering to H-Implantation-Induced Cavities in SOI Material",

author = "Miao Zhang and Chenglu Lin and Chu, \{Paul K.\}",

year = "2000",

month = sep,

language = "English",

booktitle = "XIIIth International Conference on Ion Implantation Technology (IIT2000)",

note = "XIIIth International Conference on Ion Implantation Technology (IIT2000), IIT2000 ; Conference date: 17-09-2000 Through 22-09-2000",

}

TY - GEN

T1 - XTEM Study of Ni Gettering to H-Implantation-Induced Cavities in SOI Material

AU - Zhang, Miao

AU - Lin, Chenglu

AU - Chu, Paul K.

PY - 2000/9

Y1 - 2000/9

M3 - RGC 32 - Refereed conference paper (with host publication)

BT - XIIIth International Conference on Ion Implantation Technology (IIT2000)

T2 - XIIIth International Conference on Ion Implantation Technology (IIT2000)

Y2 - 17 September 2000 through 22 September 2000

ER -