TY - JOUR
T1 - Wide-range tunable magnetic lens for tabletop electron microscope
AU - Chang, Wei-Yu
AU - Chen, Fu-Rong
PY - 2016/12
Y1 - 2016/12
N2 - A tabletop scanning electron microscope (SEM) utilizes permanent magnets as condenser lenses to minimize its size, but this sacrifices the tunability of condenser lenses such that a tabletop system can only be operated with a fixed accelerating voltage. In contrast, the traditional condenser lens utilizes an electromagnetic coil to adjust the optical properties, but the size of the electromagnetic lens is inevitably larger. Here, we propose a tunable condenser lens for a tabletop SEM that uses a combination of permanent magnets and electromagnetic coils. The overall dimensions of the newly designed lens are the same as the original permanent magnet lens, but the new lens allows the tabletop SEM to be operated at different accelerating voltages between 1 kV and 15 kV.
AB - A tabletop scanning electron microscope (SEM) utilizes permanent magnets as condenser lenses to minimize its size, but this sacrifices the tunability of condenser lenses such that a tabletop system can only be operated with a fixed accelerating voltage. In contrast, the traditional condenser lens utilizes an electromagnetic coil to adjust the optical properties, but the size of the electromagnetic lens is inevitably larger. Here, we propose a tunable condenser lens for a tabletop SEM that uses a combination of permanent magnets and electromagnetic coils. The overall dimensions of the newly designed lens are the same as the original permanent magnet lens, but the new lens allows the tabletop SEM to be operated at different accelerating voltages between 1 kV and 15 kV.
KW - Tabletop SEM
KW - Tunable condenser lens
UR - http://www.scopus.com/inward/record.url?scp=84988451829&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84988451829&origin=recordpage
U2 - 10.1016/j.ultramic.2016.09.008
DO - 10.1016/j.ultramic.2016.09.008
M3 - RGC 21 - Publication in refereed journal
SN - 0304-3991
VL - 171
SP - 139
EP - 145
JO - Ultramicroscopy
JF - Ultramicroscopy
ER -