Wide-range tunable magnetic lens for tabletop electron microscope

Wei-Yu Chang, Fu-Rong Chen*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

4 Citations (Scopus)

Abstract

A tabletop scanning electron microscope (SEM) utilizes permanent magnets as condenser lenses to minimize its size, but this sacrifices the tunability of condenser lenses such that a tabletop system can only be operated with a fixed accelerating voltage. In contrast, the traditional condenser lens utilizes an electromagnetic coil to adjust the optical properties, but the size of the electromagnetic lens is inevitably larger. Here, we propose a tunable condenser lens for a tabletop SEM that uses a combination of permanent magnets and electromagnetic coils. The overall dimensions of the newly designed lens are the same as the original permanent magnet lens, but the new lens allows the tabletop SEM to be operated at different accelerating voltages between 1 kV and 15 kV.
Original languageEnglish
Pages (from-to)139-145
JournalUltramicroscopy
Volume171
Online published19 Sept 2016
DOIs
Publication statusPublished - Dec 2016
Externally publishedYes

Research Keywords

  • Tabletop SEM
  • Tunable condenser lens

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