Wide Range Fabrication of Wrinkle Patterns for Maximizing Surface Charge Density of a Triboelectric Nanogenerator

Xiaoliang Cheng, Zijian Song, Liming Miao, Hang Guo, Zongming Su, Yu Song, Hai-Xia Zhang*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

31 Citations (Scopus)

Abstract

Wrinkle patterns, as a simple surface patterning process, have been previously used in triboelectric nanogenerator (TENG) to improve electric performance. However, since lacking an effective way to control the wrinkle pattern in a wide range, the influence of wrinkle pattern to the performance of TENG has not been systematically investigated. This paper proposes a pre-heating process to adjust the modulus of uncured polydimethylsiloxane, resulting in wide-range controllable wrinkle patterns. Quantitative measurements show the wrinkle pattern wavelength (λ) could be varied from 20.13 to 0.92∼μ\m by pre-heating time from 0 to 10 min. Using this wide-range wrinkle pattern, the performance of TENG was remarkably improved with a higher surface charge density of 537.6∼μC\m2. Through simulating the impact of interfacial structures deformation, we found smaller structure leading to higher performance of TENG at low pressure region and smaller surface area resulting in a lower performance, which accounted for the correlation we observed in this paper, and could guide the structure design for a high-charge-density TENG. This paper provides an alternative way for controlling wrinkle pattern as well as increasing surface charge density of TENG from fabrication process, simulated results, theoretical analysis, and quantitative measurements. © 1992-2012 IEEE.
Original languageEnglish
Article number8233178
Pages (from-to)106-112
JournalJournal of Microelectromechanical Systems
Volume27
Issue number1
DOIs
Publication statusPublished - 1 Feb 2018
Externally publishedYes

Bibliographical note

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Research Keywords

  • fluorocarbon plasma
  • triboelectric nanogenerator
  • Wrinkle pattern

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