Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D)

P. Yang; J.Y. Chen; Y.X. Leng; J. Wang; G. J. Wan; N. Huang; Y. Leng; P.K. Chu

doi:10.1109/PLASMA.2002.1030639

Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D)

P. Yang, J.Y. Chen, Y.X. Leng, J. Wang, G. J. Wan, N. Huang, Y. Leng, P.K. Chu

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

Summary form only given. Hydrogenated amorphous carbon films (a-C:H) are fabricated on silicon (100) wafers at room temperature using plasma immersion ion implantation - deposition (PIII-D). By adjusting the deposition conditions and annealing parameters (in vacuum between 400-700°C), a series of a-C:H films with different hydrogen contents, structures, and chemical bonds are obtained. The film chemistry is investigated using micro-Raman spectroscopy. The surface morphology of the films is characterized using the atomic force microscopy (AFM). The composition is measured by Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD). Fourier transform infrared spectroscope (FTIR) is utilized to characterize the bonding characteristics of hydrogen to carbon in the a-C:H films. The wettability of the films is investigated by contact angle measurements with different well-known liquids and physiological solutions. The surface energy and its polar and dispersive part are determined. The experimental results are used to study the influence of the different composition and structure on the wettability of the a-C:H films, a parameter that is crucial to biomedical applications.

Original language	English
Title of host publication	IEEE Conference Record - Abstracts
Subtitle of host publication	2002 IEEE International Conference on Plasma Science
Pages	313
DOIs	https://doi.org/10.1109/PLASMA.2002.1030639
Publication status	Published - May 2002
Event	The 29th IEEE International Conference on Plasma Science (ICOPS 2002) - Banff, Canada Duration: 26 May 2002 → 30 May 2002

Conference

Conference	The 29th IEEE International Conference on Plasma Science (ICOPS 2002)
Abbreviated title	ICOPS 2002
Country/Territory	Canada
City	Banff
Period	26/05/02 → 30/05/02

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Yang, P., Chen, J. Y., Leng, Y. X., Wang, J., Wan, G. J., Huang, N., Leng, Y., & Chu, P. K. (2002). Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D). In IEEE Conference Record - Abstracts: 2002 IEEE International Conference on Plasma Science (pp. 313) https://doi.org/10.1109/PLASMA.2002.1030639

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title = "Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D)",

abstract = "Summary form only given. Hydrogenated amorphous carbon films (a-C:H) are fabricated on silicon (100) wafers at room temperature using plasma immersion ion implantation - deposition (PIII-D). By adjusting the deposition conditions and annealing parameters (in vacuum between 400-700°C), a series of a-C:H films with different hydrogen contents, structures, and chemical bonds are obtained. The film chemistry is investigated using micro-Raman spectroscopy. The surface morphology of the films is characterized using the atomic force microscopy (AFM). The composition is measured by Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD). Fourier transform infrared spectroscope (FTIR) is utilized to characterize the bonding characteristics of hydrogen to carbon in the a-C:H films. The wettability of the films is investigated by contact angle measurements with different well-known liquids and physiological solutions. The surface energy and its polar and dispersive part are determined. The experimental results are used to study the influence of the different composition and structure on the wettability of the a-C:H films, a parameter that is crucial to biomedical applications.",

author = "P. Yang and J.Y. Chen and Y.X. Leng and J. Wang and Wan, {G. J.} and N. Huang and Y. Leng and P.K. Chu",

year = "2002",

month = may,

doi = "10.1109/PLASMA.2002.1030639",

language = "English",

isbn = "0-7803-7407-X",

pages = "313",

booktitle = "IEEE Conference Record - Abstracts",

note = "The 29th IEEE International Conference on Plasma Science (ICOPS 2002), ICOPS 2002 ; Conference date: 26-05-2002 Through 30-05-2002",

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Yang, P, Chen, JY, Leng, YX, Wang, J, Wan, GJ, Huang, N, Leng, Y & Chu, PK 2002, Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D). in IEEE Conference Record - Abstracts: 2002 IEEE International Conference on Plasma Science. pp. 313, The 29th IEEE International Conference on Plasma Science (ICOPS 2002), Banff, Alberta, Canada, 26/05/02. https://doi.org/10.1109/PLASMA.2002.1030639

Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D). / Yang, P.; Chen, J.Y.; Leng, Y.X. et al.
IEEE Conference Record - Abstracts: 2002 IEEE International Conference on Plasma Science. 2002. p. 313.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D)

AU - Yang, P.

AU - Chen, J.Y.

AU - Leng, Y.X.

AU - Wang, J.

AU - Wan, G. J.

AU - Huang, N.

AU - Leng, Y.

AU - Chu, P.K.

PY - 2002/5

Y1 - 2002/5

N2 - Summary form only given. Hydrogenated amorphous carbon films (a-C:H) are fabricated on silicon (100) wafers at room temperature using plasma immersion ion implantation - deposition (PIII-D). By adjusting the deposition conditions and annealing parameters (in vacuum between 400-700°C), a series of a-C:H films with different hydrogen contents, structures, and chemical bonds are obtained. The film chemistry is investigated using micro-Raman spectroscopy. The surface morphology of the films is characterized using the atomic force microscopy (AFM). The composition is measured by Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD). Fourier transform infrared spectroscope (FTIR) is utilized to characterize the bonding characteristics of hydrogen to carbon in the a-C:H films. The wettability of the films is investigated by contact angle measurements with different well-known liquids and physiological solutions. The surface energy and its polar and dispersive part are determined. The experimental results are used to study the influence of the different composition and structure on the wettability of the a-C:H films, a parameter that is crucial to biomedical applications.

AB - Summary form only given. Hydrogenated amorphous carbon films (a-C:H) are fabricated on silicon (100) wafers at room temperature using plasma immersion ion implantation - deposition (PIII-D). By adjusting the deposition conditions and annealing parameters (in vacuum between 400-700°C), a series of a-C:H films with different hydrogen contents, structures, and chemical bonds are obtained. The film chemistry is investigated using micro-Raman spectroscopy. The surface morphology of the films is characterized using the atomic force microscopy (AFM). The composition is measured by Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD). Fourier transform infrared spectroscope (FTIR) is utilized to characterize the bonding characteristics of hydrogen to carbon in the a-C:H films. The wettability of the films is investigated by contact angle measurements with different well-known liquids and physiological solutions. The surface energy and its polar and dispersive part are determined. The experimental results are used to study the influence of the different composition and structure on the wettability of the a-C:H films, a parameter that is crucial to biomedical applications.

UR - http://www.cityu.edu.hk/phy/appkchu/Publications/2002/02.C13.pdf

U2 - 10.1109/PLASMA.2002.1030639

DO - 10.1109/PLASMA.2002.1030639

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-7407-X

SP - 313

BT - IEEE Conference Record - Abstracts

T2 - The 29th IEEE International Conference on Plasma Science (ICOPS 2002)

Y2 - 26 May 2002 through 30 May 2002

ER -

Yang P, Chen JY, Leng YX, Wang J, Wan GJ, Huang N et al. Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D). In IEEE Conference Record - Abstracts: 2002 IEEE International Conference on Plasma Science. 2002. p. 313 doi: 10.1109/PLASMA.2002.1030639

Wettability and Other Properties of Amorphous Hydrogenated Carbon (a-C:H) Films for Biomedical Applications Synthesized by Plasma Immersion Ion Implantation – Deposition (PIII-D)

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