Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Qiuna Zhuang
  • Mengge Wu
  • Fan Chen
  • Quanjing Mei
  • Yingying Zhou
  • Qiyao Huang
  • Xin Zhao
  • Zijian Zheng

Detail(s)

Original languageEnglish
Article numbereadg8602
Journal / PublicationScience Advances
Volume9
Issue number22
Online published31 May 2023
Publication statusPublished - 2 Jun 2023

Link(s)

Abstract

Implantable bioelectronics provide unprecedented opportunities for real-time and continuous monitoring of physiological signals of living bodies. Most bioelectronics adopt thin-film substrates such as polyimide and polydimethylsiloxane that exhibit high levels of flexibility and stretchability. However, the low permeability and relatively high modulus of these thin films hamper the long-term biocompatibility. In contrast, devices fabricated on porous substrates show the advantages of high permeability but suffer from low patterning density. Here, we report a wafer-scale patternable strategy for the high-resolution fabrication of supersoft, stretchable, and permeable liquid metal microelectrodes (μLMEs). We demonstrate 2-μm patterning capability, or an ultrahigh density of ~75,500 electrodes/cm2, of μLME arrays on a wafer-size (diameter, 100 mm) elastic fiber mat by photolithography. We implant the μLME array as a neural interface for high spatiotemporal mapping and intervention of electrocorticography signals of living rats. The implanted μLMEs have chronic biocompatibility over a period of eight months. © 2023 The Authors, some rights reserved; exclusive licensee American Association for the  Advancement of Science. No claim to original U.S. Government Works.

Research Area(s)

Citation Format(s)

Wafer-patterned, permeable, and stretchable liquid metal microelectrodes for implantable bioelectronics with chronic biocompatibility. / Zhuang, Qiuna; Yao, Kuanming; Wu, Mengge et al.
In: Science Advances, Vol. 9, No. 22, eadg8602, 02.06.2023.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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