Wafer-scale thin-film lithium niobate device fabrication and characterization

Wenzhao SUN; Ke ZHANG; Hanke FENG; Cheng WANG

doi:10.1109/TENCON55691.2022.9977696

Wafer-scale thin-film lithium niobate device fabrication and characterization

Wenzhao SUN
, Ke ZHANG
, Hanke FENG
, Cheng WANG

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

Lithium niobate is an excellent optical material and is of great significance for future photonic integrated circuits. This work studies the wafer-scale fabrication of thin-film lithium niobate devices and demonstrates a robust process flow to realize photonic elements with optical loss of - 0.1 dB/cm.

Original language	English
Title of host publication	2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration
Subtitle of host publication	“Tech-Biz Intelligence”
Publisher	IEEE
Number of pages	2
ISBN (Electronic)	978-1-6654-5095-9
DOIs	https://doi.org/10.1109/TENCON55691.2022.9977696
Publication status	Published - 2022
Event	2022 IEEE Region 10 International Conference, TENCON 2022 - Virtual, Online, Hong Kong, China Duration: 1 Nov 2022 → 4 Nov 2022 https://www.tencon2022.org/

Publication series

Name	IEEE Region Annual International Conference, Proceedings/TENCON
ISSN (Print)	2159-3442
ISSN (Electronic)	2159-3450

Conference

Conference	2022 IEEE Region 10 International Conference, TENCON 2022
Place	Hong Kong, China
City	Virtual, Online
Period	1/11/22 → 4/11/22
Internet address	https://www.tencon2022.org/

Funding

This work was supported in part by National Natural Science Foundation of China (61922092); Research Grants Council, University Grants Committee (CityU 21208219); Croucher Foundation (9509005); City University of Hong Kong (9610402, 9610455).

Research Keywords

lithium niobate
photonic integrated circuit
quality factor
wafer-scale

RGC Funding Information

RGC-funded

Access Output

10.1109/TENCON55691.2022.9977696

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Cite this

SUN, W., ZHANG, K., FENG, H., & WANG, C. (2022). Wafer-scale thin-film lithium niobate device fabrication and characterization. In 2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration: “Tech-Biz Intelligence” (IEEE Region Annual International Conference, Proceedings/TENCON). IEEE. https://doi.org/10.1109/TENCON55691.2022.9977696

@inproceedings{96f22281e00144c4b5d2d90299da0c21,

title = "Wafer-scale thin-film lithium niobate device fabrication and characterization",

abstract = "Lithium niobate is an excellent optical material and is of great significance for future photonic integrated circuits. This work studies the wafer-scale fabrication of thin-film lithium niobate devices and demonstrates a robust process flow to realize photonic elements with optical loss of - 0.1 dB/cm.",

keywords = "lithium niobate, photonic integrated circuit, quality factor, wafer-scale",

author = "Wenzhao SUN and Ke ZHANG and Hanke FENG and Cheng WANG",

year = "2022",

doi = "10.1109/TENCON55691.2022.9977696",

language = "English",

series = "IEEE Region Annual International Conference, Proceedings/TENCON",

publisher = "IEEE",

booktitle = "2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration",

address = "United States",

note = "2022 IEEE Region 10 International Conference, TENCON 2022 ; Conference date: 01-11-2022 Through 04-11-2022",

url = "https://www.tencon2022.org/",

}

SUN, W, ZHANG, K , FENG, H & WANG, C 2022, Wafer-scale thin-film lithium niobate device fabrication and characterization. in 2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration: “Tech-Biz Intelligence”. IEEE Region Annual International Conference, Proceedings/TENCON, IEEE, 2022 IEEE Region 10 International Conference, TENCON 2022, Virtual, Online, Hong Kong, China, 1/11/22. https://doi.org/10.1109/TENCON55691.2022.9977696

Wafer-scale thin-film lithium niobate device fabrication and characterization. / SUN, Wenzhao; ZHANG, Ke ; FENG, Hanke et al.
2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration: “Tech-Biz Intelligence”. IEEE, 2022. (IEEE Region Annual International Conference, Proceedings/TENCON).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Wafer-scale thin-film lithium niobate device fabrication and characterization

AU - SUN, Wenzhao

AU - ZHANG, Ke

AU - FENG, Hanke

AU - WANG, Cheng

PY - 2022

Y1 - 2022

N2 - Lithium niobate is an excellent optical material and is of great significance for future photonic integrated circuits. This work studies the wafer-scale fabrication of thin-film lithium niobate devices and demonstrates a robust process flow to realize photonic elements with optical loss of - 0.1 dB/cm.

AB - Lithium niobate is an excellent optical material and is of great significance for future photonic integrated circuits. This work studies the wafer-scale fabrication of thin-film lithium niobate devices and demonstrates a robust process flow to realize photonic elements with optical loss of - 0.1 dB/cm.

KW - lithium niobate

KW - photonic integrated circuit

KW - quality factor

KW - wafer-scale

UR - https://www.scopus.com/pages/publications/85145653121

UR - https://www.scopus.com/pages/publications/85145653121#tab=impact

U2 - 10.1109/TENCON55691.2022.9977696

DO - 10.1109/TENCON55691.2022.9977696

M3 - RGC 32 - Refereed conference paper (with host publication)

T3 - IEEE Region Annual International Conference, Proceedings/TENCON

BT - 2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration

PB - IEEE

T2 - 2022 IEEE Region 10 International Conference, TENCON 2022

Y2 - 1 November 2022 through 4 November 2022

ER -

SUN W, ZHANG K , FENG H , WANG C. Wafer-scale thin-film lithium niobate device fabrication and characterization. In 2022 IEEE TENCON - Proceedings of 2022 IEEE Region 10 International Conference cum IEEE Hong Kong 50th Anniversary Celebration: “Tech-Biz Intelligence”. IEEE. 2022. (IEEE Region Annual International Conference, Proceedings/TENCON). Epub 2022 Dec 20. doi: 10.1109/TENCON55691.2022.9977696

Wafer-scale thin-film lithium niobate device fabrication and characterization

Abstract

Publication series

Conference

Funding

Research Keywords

RGC Funding Information

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

CROU_RMG: Scaling Up Lithium Niobite Photonics for Future Optoelectronics-RMGS

ECS: Integrated Lithium Niobate Photonics for Millimeter-wave Applications

Cite this

Wafer-scale thin-film lithium niobate device fabrication and characterization

Abstract

Publication series

Conference

Funding

Research Keywords

RGC Funding Information

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Projects

CROU_RMG: Scaling Up Lithium Niobite Photonics for Future Optoelectronics-RMGS

ECS: Integrated Lithium Niobate Photonics for Millimeter-wave Applications

Cite this