Vibrational analysis of oxygen-plasma treated indium tin oxide

P. He; S. D. Wang; W. K. Wong; L. F. Cheng; C. S. Lee; S. T. Lee; S. Y. Liu

doi:10.1016/S0009-2614(03)00177-5

Vibrational analysis of oxygen-plasma treated indium tin oxide

P. He
, S. D. Wang
, W. K. Wong
, L. F. Cheng
, C. S. Lee
, S. T. Lee
, S. Y. Liu

Centre of Super-Diamond and Advanced Films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

21 Citations (Scopus)

Abstract

High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the 'as-received' ITO was the loss peaks associated with the CH_x group. Oxygen-plasma treatment of ITO led to the disappearance of the CH_x loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CH_x group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment. © 2003 Elsevier Science B.V. All rights reserved.

Original language	English
Pages (from-to)	795-798
Journal	Chemical Physics Letters
Volume	370
Issue number	5-6
DOIs	https://doi.org/10.1016/S0009-2614(03)00177-5
Publication status	Published - 21 Mar 2003

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@article{154eca84ca0b473a894a3ab34973ac20,

title = "Vibrational analysis of oxygen-plasma treated indium tin oxide",

abstract = "High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the 'as-received' ITO was the loss peaks associated with the CHx group. Oxygen-plasma treatment of ITO led to the disappearance of the CHx loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CHx group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment. {\textcopyright} 2003 Elsevier Science B.V. All rights reserved.",

author = "P. He and Wang, \{S. D.\} and Wong, \{W. K.\} and Cheng, \{L. F.\} and Lee, \{C. S.\} and Lee, \{S. T.\} and Liu, \{S. Y.\}",

year = "2003",

month = mar,

day = "21",

doi = "10.1016/S0009-2614(03)00177-5",

language = "English",

volume = "370",

pages = "795--798",

journal = "Chemical Physics Letters",

issn = "0009-2614",

publisher = "Elsevier B.V.",

number = "5-6",

}

TY - JOUR

T1 - Vibrational analysis of oxygen-plasma treated indium tin oxide

AU - He, P.

AU - Wang, S. D.

AU - Wong, W. K.

AU - Cheng, L. F.

AU - Lee, C. S.

AU - Lee, S. T.

AU - Liu, S. Y.

PY - 2003/3/21

Y1 - 2003/3/21

N2 - High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the 'as-received' ITO was the loss peaks associated with the CHx group. Oxygen-plasma treatment of ITO led to the disappearance of the CHx loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CHx group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment. © 2003 Elsevier Science B.V. All rights reserved.

AB - High-resolution electron-energy-loss spectroscopy (HREELS) showed that the dominant feature in the HREELS spectrum of the 'as-received' ITO was the loss peaks associated with the CHx group. Oxygen-plasma treatment of ITO led to the disappearance of the CHx loss peaks, and a concomitant increase in the intensity of the phonon peaks at 71 and 134 meV. The result indicates the removal of the CHx group and additional oxidation of the ITO surface by the oxygen-plasma treatment. Both processes are proposed to be responsible for the increase in work function of ITO by the oxygen-plasma treatment. © 2003 Elsevier Science B.V. All rights reserved.

UR - https://www.scopus.com/pages/publications/0037459292

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0037459292&origin=recordpage

U2 - 10.1016/S0009-2614(03)00177-5

DO - 10.1016/S0009-2614(03)00177-5

M3 - RGC 21 - Publication in refereed journal

SN - 0009-2614

VL - 370

SP - 795

EP - 798

JO - Chemical Physics Letters

JF - Chemical Physics Letters

IS - 5-6

ER -

Vibrational analysis of oxygen-plasma treated indium tin oxide

Abstract

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