Vertical comb array microactuators

A. Selvakumar; K. Najafi; W. H. Juan; S. Pang

Vertical comb array microactuators

A. Selvakumar, K. Najafi, W. H. Juan, S. Pang

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

25 Citations (Scopus)

Abstract

In this paper we report on the development of a new type of electrostatic actuator, called the Vertical Comb Array Microactuator (VCAM). Using a trench refill technology, and combining bulk silicon and surface polysilicon micromachining we create in/out actuation perpendicular to the wafer surface. This exploits both technologies and enables sub-micron gaps between drive electrodes to provide useful high-throw linear drive previously unattainable in the vertical direction. The VCAM can achieve deflections of up to 8μm, using actuators with 10μm high, 100μm long and 1.5μm wide beams, and with 1μm gap separation from the opposite drive electrodes. Deflections of several microns were achieved with a 25V applied voltage on fabricated devices.

Original language	English
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems
Publisher	IEEE
Pages	43-48
Publication status	Published - 1995
Externally published	Yes
Event	Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference - Amsterdam, Neth Duration: 29 Jan 1995 → 2 Feb 1995

Conference

Conference	Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference
City	Amsterdam, Neth
Period	29/01/95 → 2/02/95

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title = "Vertical comb array microactuators",

abstract = "In this paper we report on the development of a new type of electrostatic actuator, called the Vertical Comb Array Microactuator (VCAM). Using a trench refill technology, and combining bulk silicon and surface polysilicon micromachining we create in/out actuation perpendicular to the wafer surface. This exploits both technologies and enables sub-micron gaps between drive electrodes to provide useful high-throw linear drive previously unattainable in the vertical direction. The VCAM can achieve deflections of up to 8μm, using actuators with 10μm high, 100μm long and 1.5μm wide beams, and with 1μm gap separation from the opposite drive electrodes. Deflections of several microns were achieved with a 25V applied voltage on fabricated devices.",

author = "A. Selvakumar and K. Najafi and Juan, {W. H.} and S. Pang",

year = "1995",

language = "English",

pages = "43--48",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems",

publisher = "IEEE",

address = "United States",

note = "Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference ; Conference date: 29-01-1995 Through 02-02-1995",

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TY - GEN

T1 - Vertical comb array microactuators

AU - Selvakumar, A.

AU - Najafi, K.

AU - Juan, W. H.

AU - Pang, S.

PY - 1995

Y1 - 1995

N2 - In this paper we report on the development of a new type of electrostatic actuator, called the Vertical Comb Array Microactuator (VCAM). Using a trench refill technology, and combining bulk silicon and surface polysilicon micromachining we create in/out actuation perpendicular to the wafer surface. This exploits both technologies and enables sub-micron gaps between drive electrodes to provide useful high-throw linear drive previously unattainable in the vertical direction. The VCAM can achieve deflections of up to 8μm, using actuators with 10μm high, 100μm long and 1.5μm wide beams, and with 1μm gap separation from the opposite drive electrodes. Deflections of several microns were achieved with a 25V applied voltage on fabricated devices.

AB - In this paper we report on the development of a new type of electrostatic actuator, called the Vertical Comb Array Microactuator (VCAM). Using a trench refill technology, and combining bulk silicon and surface polysilicon micromachining we create in/out actuation perpendicular to the wafer surface. This exploits both technologies and enables sub-micron gaps between drive electrodes to provide useful high-throw linear drive previously unattainable in the vertical direction. The VCAM can achieve deflections of up to 8μm, using actuators with 10μm high, 100μm long and 1.5μm wide beams, and with 1μm gap separation from the opposite drive electrodes. Deflections of several microns were achieved with a 25V applied voltage on fabricated devices.

UR - http://www.scopus.com/inward/record.url?scp=0029181115&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0029181115&origin=recordpage

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 43

EP - 48

BT - Proceedings of the IEEE Micro Electro Mechanical Systems

PB - IEEE

T2 - Proceedings of the 1995 IEEE Micro Electro Mechanical Systems Conference

Y2 - 29 January 1995 through 2 February 1995

ER -

Vertical comb array microactuators

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