一種製備厚度可控氮化碳薄膜的合成裝置

Synthesizer of Controllable Carbonitride Film of Preparation Thickness

Research output: Patents, Agreements and Assignments (RGC: 51, 52, 53) › 51_Patents granted (CityU only, data source from KTO)

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Author(s)

Related Research Unit(s)

Detail(s)

Original languageChinese (Traditional)
Patent numberZL201821526519.3
Filing number201821526519.3
Publication status
  • Accepted/In press/Filed - 17 Sep 2018
  • Published - 30 Apr 2019

Link(s)

Check@CityULib
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(fec3360b-7629-4285-a585-3cc9762efc8b).html

Citation Format(s)

[ RIS ] [ BibTeX ]

一種製備厚度可控氮化碳薄膜的合成裝置. / XIONG, Wei (Inventor); ZHANG, Ruiqin (Inventor).

Patent No.: ZL201821526519.3. Apr 30, 2019.

Research output: Patents, Agreements and Assignments (RGC: 51, 52, 53) › 51_Patents granted (CityU only, data source from KTO)