用射频等离子体增强化学气相沉积在钛合金表面制备类金刚石薄膜，利用原子力显微镜、 纳米力学探针、划痕仪、 滑动摩擦和微动摩擦等研究了涂层的表面形貌和力学性能。 结果表明： 随涂层厚度的增加，表面粗糙度先增后降，最后趋于稳定，硬度和划痕临界载荷提高，室温空气条件下的滑动摩擦系数减小；对于确定的膜厚，随相对湿度增加，摩擦系数降低，这有利于其在体液环境中的应用。

Diamond-like carbon coatings with different thickness have been prepared on Ti alloy substrate by rf-plasma enhanced chemical vapor deposition (rf PECVD), their surface morphology and mechanical properties were analyzed and evaluated by AFM, nanoindentation, scratch test, friction test and fretting wear test. The results show that: with the increasing of coating thickness, the surface roughness sharply increases, then significant decreases, at last tending to stable; the hardness and bond strength increase with thickness, but the friction coefficient decreases; and the friction coefficient of DLC coatings against corundum obtained by fretting test decreases with the increase of relative humidity to be below 0.1 in an aqueous condition. All of that are beneficial to their biomedical applications in body fluids.