用射频等离子体增强化学气相沉积方法在硅片上制备了类金刚石碳膜,利用纳米压入仪的划痕附件研究了薄膜的纳米划擦行为.结果表明:在划擦过程中,随载荷增加,薄膜先后经历弹性变形、弹塑性变形、加载开裂及卸载剥离三个阶段.在连续加载直至薄膜开裂的过程中薄膜未发生剥落,卸载后薄膜与基体变形恢复不同步,发生薄膜从基体上的脆性剥落.纳米划擦实验不仅能在加载阶段获得表征薄膜内聚强度的临界载荷,而且能检测卸载过程中薄膜附着抗力有关的临界载荷,是评价类金刚石薄膜划擦抗力的有效手段之一.

Nano-scratch behaviors of diamond-like carbon (DLC) films prepared on Si substrate by rf PECVD were evaluated using a Nano Indenter® XP system with attachment of lateral force measurement (LFM). It was found that elastic recovery, elastio-plastically deforming, cracking under loading and delaminating under unloading of the film, occur successively with the increase of scratching load. Though the DLC film has not been delaminated as continuous loading until cracking of film (cracking resistance L_CL), the film was delaminated from the substrate after unloading, due to asynchronous recovery of the film and substrate. It is evident that nano-scratching test not only displays the cracking resistance charactering the cohesion strength of the film during loading, but also determines the critical load relating to adhesion of the film and the substrate during unloading.