报道了采用十八酸作为质子源制作的铌酸锂光波导的性能及其退火对波导性能的影响，给出了退火前后波导层中非常光有效折射率的剖面分布，得出了质子交换的扩散参数和波导层的表面非常光折射率的增量。 给出了波导层的表面非常光折射率的增量和扩散深度的增量与退火时间的指数关系。

Characterization of proton-exchanged optical planar waveguides in z-cut LiNbO₃ fabricated using stearic acid and effects of annealing on the index profile, the waveguide depth, the surface index changed and propagation loss have been studied systematically. Waveguide propagation losses decrease with annealing time and the variation in the surface refractive index and waveguide depth with annealing time follows a power law relationship. The annealing process is shown to be an effective means to improve and modify waveguide properties.