Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

J. E Y Lee; B. Bahreyni; Y. Zhu; A. A. Seshia

doi:10.1063/1.2822405

Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

J. E Y Lee, B. Bahreyni, Y. Zhu, A. A. Seshia

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

55 Citations (Scopus)

Abstract

A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm2 μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. © 2007 American Institute of Physics.

Original language	English
Article number	234103
Journal	Applied Physics Letters
Volume	91
Issue number	23
DOIs	https://doi.org/10.1063/1.2822405
Publication status	Published - 2007
Externally published	Yes

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title = "Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator",

abstract = "A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm2 μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. {\textcopyright} 2007 American Institute of Physics.",

author = "Lee, {J. E Y} and B. Bahreyni and Y. Zhu and Seshia, {A. A.}",

year = "2007",

doi = "10.1063/1.2822405",

language = "English",

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journal = "Applied Physics Letters",

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publisher = "American Institute of Physics",

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T1 - Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

AU - Lee, J. E Y

AU - Bahreyni, B.

AU - Zhu, Y.

AU - Seshia, A. A.

PY - 2007

Y1 - 2007

N2 - A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm2 μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. © 2007 American Institute of Physics.

AB - A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg cm2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz, with a quality factor exceeding 106. The mass sensor has a measured mass to frequency shift sensitivity of 132 Hz cm2 μg. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than 7 ppb at an operating pressure of 3.8 mTorr. © 2007 American Institute of Physics.

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-36849008064&origin=recordpage

U2 - 10.1063/1.2822405

DO - 10.1063/1.2822405

M3 - RGC 21 - Publication in refereed journal

SN - 0003-6951

VL - 91

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

M1 - 234103

ER -

Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator

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