Ultra-Shallow Junction Measurements: Optimizing SIMS for Implanted and Processed Wafers

V. K. F.   Chia; M. J.   Edgell; P. K. Chu

Ultra-Shallow Junction Measurements: Optimizing SIMS for Implanted and Processed Wafers

V. K. F. Chia
, M. J. Edgell
, P. K. Chu

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	180
Publication status	Published - Sept 1997
Externally published	Yes
Event	11th International Conference on Second Ion Mass Spectrometry - Hilton Hotel, Walt Disney World, Orlando, United States Duration: 7 Sept 1997 → 12 Sept 1997

Conference

Conference	11th International Conference on Second Ion Mass Spectrometry
Abbreviated title	SIMS XI
Place	United States
City	Orlando
Period	7/09/97 → 12/09/97

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Publication information for this record has been verified with the author(s) concerned.

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title = "Ultra-Shallow Junction Measurements: Optimizing SIMS for Implanted and Processed Wafers",

author = "Chia, \{V. K. F.\} and Edgell, \{M. J.\} and Chu, \{P. K.\}",

note = "Publication information for this record has been verified with the author(s) concerned. ; 11th International Conference on Second Ion Mass Spectrometry, SIMS XI ; Conference date: 07-09-1997 Through 12-09-1997",

year = "1997",

month = sep,

language = "English",

pages = "180",

}

Ultra-Shallow Junction Measurements: Optimizing SIMS for Implanted and Processed Wafers. / Chia, V. K. F. ; Edgell, M. J. ; Chu, P. K.
1997. 180 Paper presented at 11th International Conference on Second Ion Mass Spectrometry, Orlando, Florida, United States.

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

TY - CONF

T1 - Ultra-Shallow Junction Measurements

T2 - 11th International Conference on Second Ion Mass Spectrometry

AU - Chia, V. K. F.

AU - Edgell, M. J.

AU - Chu, P. K.

N1 - Publication information for this record has been verified with the author(s) concerned.

PY - 1997/9

Y1 - 1997/9

M3 - RGC 32 - Refereed conference paper (without host publication)

SP - 180

Y2 - 7 September 1997 through 12 September 1997

ER -