Ultra-sensitive transparent and stretchable pressure sensor with single electrode

Jinxin Zhang; Mayue Shi; Haotian Chen; Mengdi Han; Yu Song; Xiaoliang Cheng; Haixia Zhang

doi:10.1109/MEMSYS.2016.7421586

Ultra-sensitive transparent and stretchable pressure sensor with single electrode

Jinxin Zhang^*
, Mayue Shi
, Haotian Chen
, Mengdi Han
, Yu Song
, Xiaoliang Cheng
, Haixia Zhang

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

10 Citations (Scopus)

Abstract

This paper reports a novel ultra-sensitive pressure sensor with single electrode PDMS-PEDOT-Parylene 3-layers structure, which is not only super thin, but also transparent and stretchable. Therefore, it can be utilized as an important part for electronic skins or wearable devices. Thanks to the sensitive deformation of the microstructures when external pressure applied, it reaches the high sensitivity of 14.15 kPa-1 and excellent linearity in the low pressure region, and distinguishes a pressure about 0.212 Pa for the first time. Moreover, the distinctive single electrode design greatly simplifies the fabrication process and enhances the transparency of the device. © 2016 IEEE.

Original language	English
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	IEEE
Pages	173-176
Volume	2016-February
ISBN (Print)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421586
Publication status	Published - 26 Feb 2016
Externally published	Yes
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: 24 Jan 2016 → 28 Jan 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Conference

Conference	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Place	China
City	Shanghai
Period	24/01/16 → 28/01/16

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

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10.1109/MEMSYS.2016.7421586

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Zhang, J., Shi, M., Chen, H., Han, M., Song, Y., Cheng, X., & Zhang, H. (2016). Ultra-sensitive transparent and stretchable pressure sensor with single electrode. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (Vol. 2016-February, pp. 173-176). Article 7421586 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). IEEE. https://doi.org/10.1109/MEMSYS.2016.7421586

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title = "Ultra-sensitive transparent and stretchable pressure sensor with single electrode",

abstract = "This paper reports a novel ultra-sensitive pressure sensor with single electrode PDMS-PEDOT-Parylene 3-layers structure, which is not only super thin, but also transparent and stretchable. Therefore, it can be utilized as an important part for electronic skins or wearable devices. Thanks to the sensitive deformation of the microstructures when external pressure applied, it reaches the high sensitivity of 14.15 kPa-1 and excellent linearity in the low pressure region, and distinguishes a pressure about 0.212 Pa for the first time. Moreover, the distinctive single electrode design greatly simplifies the fabrication process and enhances the transparency of the device. {\textcopyright} 2016 IEEE.",

author = "Jinxin Zhang and Mayue Shi and Haotian Chen and Mengdi Han and Yu Song and Xiaoliang Cheng and Haixia Zhang",

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Zhang, J, Shi, M, Chen, H, Han, M, Song, Y, Cheng, X & Zhang, H 2016, Ultra-sensitive transparent and stretchable pressure sensor with single electrode. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. vol. 2016-February, 7421586, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, IEEE, pp. 173-176, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 24/01/16. https://doi.org/10.1109/MEMSYS.2016.7421586

Ultra-sensitive transparent and stretchable pressure sensor with single electrode. / Zhang, Jinxin; Shi, Mayue; Chen, Haotian et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2016-February IEEE, 2016. p. 173-176 7421586 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

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AU - Zhang, Jinxin

AU - Shi, Mayue

AU - Chen, Haotian

AU - Han, Mengdi

AU - Song, Yu

AU - Cheng, Xiaoliang

AU - Zhang, Haixia

N1 - Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

PY - 2016/2/26

Y1 - 2016/2/26

N2 - This paper reports a novel ultra-sensitive pressure sensor with single electrode PDMS-PEDOT-Parylene 3-layers structure, which is not only super thin, but also transparent and stretchable. Therefore, it can be utilized as an important part for electronic skins or wearable devices. Thanks to the sensitive deformation of the microstructures when external pressure applied, it reaches the high sensitivity of 14.15 kPa-1 and excellent linearity in the low pressure region, and distinguishes a pressure about 0.212 Pa for the first time. Moreover, the distinctive single electrode design greatly simplifies the fabrication process and enhances the transparency of the device. © 2016 IEEE.

AB - This paper reports a novel ultra-sensitive pressure sensor with single electrode PDMS-PEDOT-Parylene 3-layers structure, which is not only super thin, but also transparent and stretchable. Therefore, it can be utilized as an important part for electronic skins or wearable devices. Thanks to the sensitive deformation of the microstructures when external pressure applied, it reaches the high sensitivity of 14.15 kPa-1 and excellent linearity in the low pressure region, and distinguishes a pressure about 0.212 Pa for the first time. Moreover, the distinctive single electrode design greatly simplifies the fabrication process and enhances the transparency of the device. © 2016 IEEE.

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UR - https://www.scopus.com/pages/publications/84970956205#tab=impact

U2 - 10.1109/MEMSYS.2016.7421586

DO - 10.1109/MEMSYS.2016.7421586

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems

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ER -

Zhang J, Shi M, Chen H, Han M, Song Y, Cheng X et al. Ultra-sensitive transparent and stretchable pressure sensor with single electrode. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Vol. 2016-February. IEEE. 2016. p. 173-176. 7421586. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421586

Ultra-sensitive transparent and stretchable pressure sensor with single electrode

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