Ultra-Low-Power and High-Frequency-Response Carbon Nanotube Based MEMS Thermal Sensors

Carmen K.M. Fung; Wen J. Li

doi:10.1109/IROS.2003.1249225

Ultra-Low-Power and High-Frequency-Response Carbon Nanotube Based MEMS Thermal Sensors

Carmen K.M. Fung, Wen J. Li^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

10 Citations (Scopus)

Abstract

A novel bulk multi-walled carbon nanotubes (MWNT) based MEMS thermal sensor was fabricated using a polymer thin film to encapsulate MWNT sensing elements. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. This encapsulation process ensures that the MWNT elements can be protected from moisture and contaminates in an operational environment, and thus, allow the sensors to be useful for potential application such as temperature measurement in water, sensing human touch and body temperature, or as ultra-sensitive sensors in manufacturing plants. We have measured the temperature coefficient of resistance (TCR) of these encapsulated MWNT-based micro sensors and also integrated them into constant current configuration for dynamic characterization. The I-V measurements of the resulting devices revealed that their power consumption were in the μW range. Besides, the frequency response of the testing devices was generally over 100 kHz in constant current mode operation. Based on these experimental evidences, carbon nanotube is a promising material for fabricating ultra low power consumption and high frequency response micro sensors for future sensing and electronic applications. © 2003 IEEE

Original language	English
Title of host publication	Proceedings - 2003 IEEE International Conference on Intelligent Robots and Systems (IROS 2003)
Publisher	IEEE
Pages	2371-2376
Volume	3
ISBN (Print)	0-7803-7860-1
DOIs	https://doi.org/10.1109/IROS.2003.1249225
Publication status	Published - Oct 2003
Externally published	Yes
Event	2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) - Las Vegas, NV, United States Duration: 27 Oct 2003 → 31 Oct 2003

Conference

Conference	2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003)
Place	United States
City	Las Vegas, NV
Period	27/10/03 → 31/10/03

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@inproceedings{e71a84a54a3b43acbbc184032d7ceca3,

title = "Ultra-Low-Power and High-Frequency-Response Carbon Nanotube Based MEMS Thermal Sensors",

abstract = "A novel bulk multi-walled carbon nanotubes (MWNT) based MEMS thermal sensor was fabricated using a polymer thin film to encapsulate MWNT sensing elements. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. This encapsulation process ensures that the MWNT elements can be protected from moisture and contaminates in an operational environment, and thus, allow the sensors to be useful for potential application such as temperature measurement in water, sensing human touch and body temperature, or as ultra-sensitive sensors in manufacturing plants. We have measured the temperature coefficient of resistance (TCR) of these encapsulated MWNT-based micro sensors and also integrated them into constant current configuration for dynamic characterization. The I-V measurements of the resulting devices revealed that their power consumption were in the μW range. Besides, the frequency response of the testing devices was generally over 100 kHz in constant current mode operation. Based on these experimental evidences, carbon nanotube is a promising material for fabricating ultra low power consumption and high frequency response micro sensors for future sensing and electronic applications. {\textcopyright} 2003 IEEE",

author = "Fung, {Carmen K.M.} and Li, {Wen J.}",

year = "2003",

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doi = "10.1109/IROS.2003.1249225",

language = "English",

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Fung, CKM & Li, WJ 2003, Ultra-Low-Power and High-Frequency-Response Carbon Nanotube Based MEMS Thermal Sensors. in Proceedings - 2003 IEEE International Conference on Intelligent Robots and Systems (IROS 2003). vol. 3, IEEE, pp. 2371-2376, 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003), Las Vegas, NV, United States, 27/10/03. https://doi.org/10.1109/IROS.2003.1249225

Ultra-Low-Power and High-Frequency-Response Carbon Nanotube Based MEMS Thermal Sensors. / Fung, Carmen K.M.; Li, Wen J.
Proceedings - 2003 IEEE International Conference on Intelligent Robots and Systems (IROS 2003). Vol. 3 IEEE, 2003. p. 2371-2376.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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AU - Fung, Carmen K.M.

AU - Li, Wen J.

PY - 2003/10

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N2 - A novel bulk multi-walled carbon nanotubes (MWNT) based MEMS thermal sensor was fabricated using a polymer thin film to encapsulate MWNT sensing elements. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. This encapsulation process ensures that the MWNT elements can be protected from moisture and contaminates in an operational environment, and thus, allow the sensors to be useful for potential application such as temperature measurement in water, sensing human touch and body temperature, or as ultra-sensitive sensors in manufacturing plants. We have measured the temperature coefficient of resistance (TCR) of these encapsulated MWNT-based micro sensors and also integrated them into constant current configuration for dynamic characterization. The I-V measurements of the resulting devices revealed that their power consumption were in the μW range. Besides, the frequency response of the testing devices was generally over 100 kHz in constant current mode operation. Based on these experimental evidences, carbon nanotube is a promising material for fabricating ultra low power consumption and high frequency response micro sensors for future sensing and electronic applications. © 2003 IEEE

AB - A novel bulk multi-walled carbon nanotubes (MWNT) based MEMS thermal sensor was fabricated using a polymer thin film to encapsulate MWNT sensing elements. The basic process includes AC electrophoretic manipulation of MWNT bundles on a silicon substrate and embedding them inside parylene C layers to provide a robust protection for the bundled MWNT. This encapsulation process ensures that the MWNT elements can be protected from moisture and contaminates in an operational environment, and thus, allow the sensors to be useful for potential application such as temperature measurement in water, sensing human touch and body temperature, or as ultra-sensitive sensors in manufacturing plants. We have measured the temperature coefficient of resistance (TCR) of these encapsulated MWNT-based micro sensors and also integrated them into constant current configuration for dynamic characterization. The I-V measurements of the resulting devices revealed that their power consumption were in the μW range. Besides, the frequency response of the testing devices was generally over 100 kHz in constant current mode operation. Based on these experimental evidences, carbon nanotube is a promising material for fabricating ultra low power consumption and high frequency response micro sensors for future sensing and electronic applications. © 2003 IEEE

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Y2 - 27 October 2003 through 31 October 2003

ER -

Ultra-Low-Power and High-Frequency-Response Carbon Nanotube Based MEMS Thermal Sensors

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