Two-dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores

Research output: Conference Papers (RGC: 31A, 31B, 32, 33) › 32_Refereed conference paper (without host publication) › peer-review

Author(s)

Original language	English
Publication status	Published - Oct 1999

Title	3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99)
Place	China
City	Beijing
Period	10 - 14 October 1999

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Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(ab424128-ff42-4e57-972e-6d710df9080f).html

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[ RIS ] [ BibTeX ]

Two-dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores. / Liu, A.G.; Wang, X.F.; Wang, S.Y. et al.
1999. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Research output: Conference Papers (RGC: 31A, 31B, 32, 33) › 32_Refereed conference paper (without host publication) › peer-review

Liu, AG, Wang, XF, Wang, SY, Tang, BY & Chu, PK 1999, 'Two-dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores', Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China, 10/10/99 - 14/10/99.

Liu, A. G., Wang, X. F., Wang, S. Y., Tang, B. Y., & Chu, P. K. (1999). Two-dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Liu AG, Wang XF, Wang SY, Tang BY, Chu PK. Two-dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores. 1999. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.

Liu, A.G. ; Wang, X.F. ; Wang, S.Y. et al. / Two-dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores. Paper presented at 3rd International Conference on Physical and Numerical Simulation of Materials and Hot Working (ICPNS '99), Beijing, China.