Two-dimensional simulation of plasma implantation into strip-shaped insulating targets

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	ABSTRACTS - 1st Asian Symposium on Ion and Plasma Surface Finishing
Pages	5
Publication status	Published - Aug 2002
Event	1st Asian Symposium on Ion and Plasma Surface Finishing (ASIP 2002) - Nagasaki, Japan Duration: 29 Aug 2002 → 30 Aug 2002

Conference	1st Asian Symposium on Ion and Plasma Surface Finishing (ASIP 2002)
Place	Japan
City	Nagasaki
Period	29/08/02 → 30/08/02

Other Access Options

@inproceedings{6c1e953147184799bed4066089683302,

title = "Two-dimensional simulation of plasma implantation into strip-shaped insulating targets",

author = "Tian, \{X. B.\} and Chu, \{P. K.\}",

year = "2002",

month = aug,

language = "English",

pages = "5",

booktitle = "ABSTRACTS - 1st Asian Symposium on Ion and Plasma Surface Finishing",

note = "1st Asian Symposium on Ion and Plasma Surface Finishing (ASIP 2002) ; Conference date: 29-08-2002 Through 30-08-2002",

}

TY - GEN

T1 - Two-dimensional simulation of plasma implantation into strip-shaped insulating targets

AU - Tian, X. B.

AU - Chu, P. K.

PY - 2002/8

Y1 - 2002/8

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 5

BT - ABSTRACTS - 1st Asian Symposium on Ion and Plasma Surface Finishing

T2 - 1st Asian Symposium on Ion and Plasma Surface Finishing (ASIP 2002)

Y2 - 29 August 2002 through 30 August 2002

ER -