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Tuning the thickness of black phosphorus via hydrogen plasma treatment

    Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review

    Abstract

    Black phosphorus (BP), consisting of a weak van der Waals interlayer interaction and strong in-plane bonds, has high carrier mobility and tunable band gap (0.3-2.0 eV), offering properties for electric and optoelectronic devices [1-3]. Here, we report a controllable thinning method by using hydrogen plasma etching to thin down mechanically exfoliated BP flakes.
    Original languageEnglish
    Pages202-203
    Publication statusPublished - Oct 2017
    Event14th International Conference on Plasma Based Ion Implantation & Deposition (PBII&D 2017) - New World Shanghai Hotel, Shanghai, China
    Duration: 17 Oct 201720 Oct 2017

    Conference

    Conference14th International Conference on Plasma Based Ion Implantation & Deposition (PBII&D 2017)
    Abbreviated titlePBII&D 2017
    PlaceChina
    CityShanghai
    Period17/10/1720/10/17

    Research Keywords

    • Black phosphorus
    • plasma etching
    • thickness control

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