Tungsten-rich deposits at anode using carbon nanotube emitters

Fumihito Arai; Pou Liu; Lixin Dong; Masahiro Nakajima; Toshio Fukuda

doi:10.1109/MHS.2003.1249933

Tungsten-rich deposits at anode using carbon nanotube emitters

Fumihito Arai
, Pou Liu
, Lixin Dong
, Masahiro Nakajima
, Toshio Fukuda

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyie (W(CO)₆) and dimethyl-gold ((CH₃)₂(C₃H₇O₂)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and to reduce energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. Factors influencing field emission characteristics of MWNT emitters are analyzed. In the deposit at anode by using W(CO)₆, mass of the tungsten reaches up to about 80% among the compositions.

Original language	English
Title of host publication	MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science
Publisher	IEEE
Pages	205-210
ISBN (Print)	0-7803-8165-3
DOIs	https://doi.org/10.1109/MHS.2003.1249933
Publication status	Published - Oct 2003
Externally published	Yes
Event	International Symposium on Micromechatronics and Human Science, MHS 2003 - Nagoya, Japan Duration: 19 Oct 2003 → 22 Oct 2003 https://ieeexplore.ieee.org/xpl/conhome/8852/proceeding

Publication series

Name	MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science

Conference

Conference	International Symposium on Micromechatronics and Human Science, MHS 2003
Place	Japan
City	Nagoya
Period	19/10/03 → 22/10/03
Internet address	https://ieeexplore.ieee.org/xpl/conhome/8852/proceeding

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 13 Climate Action

Research Keywords

electron-beam-induced deposition
carbon nanotube emitter
field mission
precursor
tungsten hexocorbonyle
dimethyl-gold

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10.1109/MHS.2003.1249933

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Arai, F., Liu, P., Dong, L., Nakajima, M., & Fukuda, T. (2003). Tungsten-rich deposits at anode using carbon nanotube emitters. In MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science (pp. 205-210). Article 1249933 (MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science). IEEE. https://doi.org/10.1109/MHS.2003.1249933

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title = "Tungsten-rich deposits at anode using carbon nanotube emitters",

abstract = "Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyie (W(CO)6) and dimethyl-gold ((CH3)2(C3H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and to reduce energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. Factors influencing field emission characteristics of MWNT emitters are analyzed. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to about 80\% among the compositions. ",

keywords = "electron-beam-induced deposition, carbon nanotube emitter, field mission, precursor, tungsten hexocorbonyle, dimethyl-gold",

author = "Fumihito Arai and Pou Liu and Lixin Dong and Masahiro Nakajima and Toshio Fukuda",

year = "2003",

month = oct,

doi = "10.1109/MHS.2003.1249933",

language = "English",

isbn = "0-7803-8165-3",

series = "MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science",

publisher = "IEEE",

pages = "205--210",

booktitle = "MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science",

address = "United States",

note = "International Symposium on Micromechatronics and Human Science, MHS 2003 ; Conference date: 19-10-2003 Through 22-10-2003",

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}

Arai, F, Liu, P, Dong, L, Nakajima, M & Fukuda, T 2003, Tungsten-rich deposits at anode using carbon nanotube emitters. in MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science., 1249933, MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science, IEEE, pp. 205-210, International Symposium on Micromechatronics and Human Science, MHS 2003, Nagoya, Japan, 19/10/03. https://doi.org/10.1109/MHS.2003.1249933

Tungsten-rich deposits at anode using carbon nanotube emitters. / Arai, Fumihito; Liu, Pou; Dong, Lixin et al.
MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science. IEEE, 2003. p. 205-210 1249933 (MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Tungsten-rich deposits at anode using carbon nanotube emitters

AU - Arai, Fumihito

AU - Liu, Pou

AU - Dong, Lixin

AU - Nakajima, Masahiro

AU - Fukuda, Toshio

PY - 2003/10

Y1 - 2003/10

N2 - Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyie (W(CO)6) and dimethyl-gold ((CH3)2(C3H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and to reduce energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. Factors influencing field emission characteristics of MWNT emitters are analyzed. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to about 80% among the compositions.

AB - Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyie (W(CO)6) and dimethyl-gold ((CH3)2(C3H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and to reduce energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. Factors influencing field emission characteristics of MWNT emitters are analyzed. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to about 80% among the compositions.

KW - electron-beam-induced deposition

KW - carbon nanotube emitter

KW - field mission

KW - precursor

KW - tungsten hexocorbonyle

KW - dimethyl-gold

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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84945157852&origin=recordpage

U2 - 10.1109/MHS.2003.1249933

DO - 10.1109/MHS.2003.1249933

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-8165-3

T3 - MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science

SP - 205

EP - 210

BT - MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science

PB - IEEE

T2 - International Symposium on Micromechatronics and Human Science, MHS 2003

Y2 - 19 October 2003 through 22 October 2003

ER -

Tungsten-rich deposits at anode using carbon nanotube emitters

Abstract

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UN SDGs

Research Keywords

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