Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints

Bing-Hai Zhou; Xin Li

doi:10.1007/s11771-012-0990-9

Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints

Bing-Hai Zhou
, Xin Li

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

12 Citations (Scopus)

Abstract

To improve the productivity of cluster tools in semiconductor fabrications, on the basis of stating scheduling problems, a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools. Firstly, mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain. Resource conflicts were analyzed in the built scheduling model, and policies to solve resource conflicts were built. A scheduling algorithm was developed. Finally, the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations. Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools. © 2012 Central South University Press and Springer-Verlag Berlin Heidelberg.

Original language	English
Pages (from-to)	187-192
Journal	Journal of Central South University of Technology (English Edition)
Volume	19
Issue number	1
DOIs	https://doi.org/10.1007/s11771-012-0990-9
Publication status	Published - Jan 2012

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

Funding

Foundation item: Projects(71071115, 60574054) supported by the National Natural Science Foundation of China Received date: 2010−12−01; Accepted date: 2011−03−15 Corresponding author: ZHOU Bing-hai, Professor, PhD; Tel: +86−13564164374; E-mail: [email protected]

Research Keywords

algorithm
cluster tools
residency constraints
scheduling model
simulation experiments

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10.1007/s11771-012-0990-9

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abstract = "To improve the productivity of cluster tools in semiconductor fabrications, on the basis of stating scheduling problems, a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools. Firstly, mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain. Resource conflicts were analyzed in the built scheduling model, and policies to solve resource conflicts were built. A scheduling algorithm was developed. Finally, the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations. Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools. {\textcopyright} 2012 Central South University Press and Springer-Verlag Berlin Heidelberg.",

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AB - To improve the productivity of cluster tools in semiconductor fabrications, on the basis of stating scheduling problems, a try and error-based scheduling algorithm was proposed with residency time constraints and an objective of minimizing Makespan for the wafer jobs in cluster tools. Firstly, mathematical formulations of scheduling problems were presented by using assumptions and definitions of a scheduling domain. Resource conflicts were analyzed in the built scheduling model, and policies to solve resource conflicts were built. A scheduling algorithm was developed. Finally, the performances of the proposed algorithm were evaluated and compared with those of other methods by simulations. Experiment results indicate that the proposed algorithm is effective and practical in solving the scheduling problem of the cluster tools. © 2012 Central South University Press and Springer-Verlag Berlin Heidelberg.

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KW - cluster tools

KW - residency constraints

KW - scheduling model

KW - simulation experiments

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Try and error-based scheduling algorithm for cluster tools of wafer fabrications with residency time constraints

Abstract

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Research Keywords

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