Tribological study of boron nitride films

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

18 Scopus Citations
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Author(s)

  • Y. M. Chong
  • Q. Ye
  • Y. Yang
  • I. Bello
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)654-660
Journal / PublicationDiamond and Related Materials
Volume19
Issue number5-6
Publication statusPublished - May 2010

Abstract

Boron nitride (BN) films with different cubic and hexagonal phase compositions were deposited on silicon substrates via diamond interlayers by magnetron sputtering and electron cyclotron resonance microwave plasma chemical vapor deposition. The tribological behaviors of the BN films were investigated systematically using a ball-on-disc tribometer with silicon nitride as the counterpart. Comparison studies were also performed on sintered cubic and hexagonal BN compacts. The influence of phase compositions and surface roughness of BN coatings on their tribological characteristics was studied. The cubic BN (cBN) films showed excellent wear resistance against silicon nitride. The wear rate of the cBN films was estimated to be about 1.0 × 10-7 mm3/N m by measuring the cross-sectional area of the wear track after the sliding test over a distance of 12 km. © 2010 Elsevier B.V. All rights reserved.

Research Area(s)

  • Boron nitride, Phase composition, Surface roughness, Tribological properties

Citation Format(s)

Tribological study of boron nitride films. / Chong, Y. M.; Ye, Q.; Yang, Y. et al.
In: Diamond and Related Materials, Vol. 19, No. 5-6, 05.2010, p. 654-660.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review