Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering

Guizhi Wu; Shengli Ma; Kewei Xu; Paul K Chu

doi:10.1116/1.3676186

Author(s)

Guizhi Wu
Shengli Ma
Kewei Xu
Paul K Chu

Detail(s)

Original language	English
Article number	21501
Journal / Publication	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	30
Issue number	2
Publication status	Published - Mar 2012

Link(s)

DOI	DOI https://doi.org/10.1116/1.3676186 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-84858025737&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(5ee2cdd4-6f4d-4aae-ab2b-c754c91e1aea).html

Abstract

Ti-Al-Si-C-N hard coatings are deposited on high speed steel by hybrid arc-enhanced magnetron sputtering, and the hardness, adhesion, and tribological behavior are studied. On account of the nanocomposite structure, the coatings possess hardness of more than 30 GPa. Failure of the coating during the scratch test is due to the buckling and wedge spallation failure mechanism. Compared to Ti-Al-Si-N, the presence of C in the Ti-Al-Si-C-N coatings leads to reduced friction coefficient and wear rate, indicating effective lubrication rendered by amorphous C. According to the wear tracks examined by scanning electron microscopy, the wear mechanism can be explained by plowing abrasion. © 2012 American Vacuum Society.

Citation Format(s)

[ RIS ] [ BibTeX ]

Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering. / Wu, Guizhi; Ma, Shengli; Xu, Kewei et al.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 30, No. 2, 21501, 03.2012.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

Wu, G, Ma, S, Xu, K & Chu, PK 2012, 'Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 30, no. 2, 21501. https://doi.org/10.1116/1.3676186

Wu, G., Ma, S., Xu, K., & Chu, P. K. (2012). Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 30(2), [21501]. https://doi.org/10.1116/1.3676186

Wu G, Ma S, Xu K, Chu PK. Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2012 Mar;30(2):21501. doi: 10.1116/1.3676186

Wu, Guizhi ; Ma, Shengli ; Xu, Kewei et al. / Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2012 ; Vol. 30, No. 2.