Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment

W. M. Tsang; F. L. Wong; M. K. Fung; J. C. Chang; C. S. Lee; S. T. Lee

doi:10.1016/j.tsf.2008.08.157

Author(s)

W. M. Tsang
F. L. Wong
M. K. Fung
J. C. Chang
S. T. Lee

Related Research Unit(s)

Centre of Super-Diamond and Advanced Films

Detail(s)

Original language	English
Pages (from-to)	891-895
Journal / Publication	Thin Solid Films
Volume	517
Issue number	2
Publication status	Published - 28 Nov 2008

Link(s)

DOI	DOI https://doi.org/10.1016/j.tsf.2008.08.157 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-55049115982&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(a6dcae8e-0b93-4b18-b67c-d559e7162cf9).html

Abstract

Aluminum-doped zinc oxide (AZO) films were fabricated at a low substrate temperature (300 °C) in air by KrF excimer laser irradiation of sol-gel spin-coated films. Structural, electrical and optical properties of the laser-irradiated films at different laser energies were studied and compared with those prepared by conventional high-temperature processing. The 200 nm laser-irradiated AZO film shows a resistivity of 44 × 10^{- 3} Ω-cm and about 90% optical transmittance in the visible range upon laser irradiation. The films were oriented preferentially along (002) direction. © 2008 Elsevier B.V. All rights reserved.

Research Area(s)

Laser annealing, Optical properties, Organic light-emitting device, Scanning electron microscopy, Sol-gel, Sol-gel deposition, Transparent conductive oxide, X-ray diffraction

Citation Format(s)

[ RIS ] [ BibTeX ]

Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment. / Tsang, W. M.; Wong, F. L.; Fung, M. K.; Chang, J. C.; Lee, C. S.; Lee, S. T.

In: Thin Solid Films, Vol. 517, No. 2, 28.11.2008, p. 891-895.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal

Tsang, WM, Wong, FL, Fung, MK, Chang, JC, Lee, CS & Lee, ST 2008, 'Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment', Thin Solid Films, vol. 517, no. 2, pp. 891-895. https://doi.org/10.1016/j.tsf.2008.08.157

Tsang, W. M., Wong, F. L., Fung, M. K., Chang, J. C., Lee, C. S., & Lee, S. T. (2008). Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment. Thin Solid Films, 517(2), 891-895. https://doi.org/10.1016/j.tsf.2008.08.157

Tsang WM, Wong FL, Fung MK, Chang JC, Lee CS, Lee ST. Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment. Thin Solid Films. 2008 Nov 28;517(2):891-895. https://doi.org/10.1016/j.tsf.2008.08.157

Tsang, W. M. ; Wong, F. L. ; Fung, M. K. ; Chang, J. C. ; Lee, C. S. ; Lee, S. T. / Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment. In: Thin Solid Films. 2008 ; Vol. 517, No. 2. pp. 891-895.