Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

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Author(s)

  • W. M. Tsang
  • F. L. Wong
  • M. K. Fung
  • J. C. Chang
  • S. T. Lee

Detail(s)

Original languageEnglish
Pages (from-to)891-895
Journal / PublicationThin Solid Films
Volume517
Issue number2
Publication statusPublished - 28 Nov 2008

Abstract

Aluminum-doped zinc oxide (AZO) films were fabricated at a low substrate temperature (300 °C) in air by KrF excimer laser irradiation of sol-gel spin-coated films. Structural, electrical and optical properties of the laser-irradiated films at different laser energies were studied and compared with those prepared by conventional high-temperature processing. The 200 nm laser-irradiated AZO film shows a resistivity of 44 × 10- 3 Ω-cm and about 90% optical transmittance in the visible range upon laser irradiation. The films were oriented preferentially along (002) direction. © 2008 Elsevier B.V. All rights reserved.

Research Area(s)

  • Laser annealing, Optical properties, Organic light-emitting device, Scanning electron microscopy, Sol-gel, Sol-gel deposition, Transparent conductive oxide, X-ray diffraction

Citation Format(s)

Transparent conducting aluminum-doped zinc oxide thin film prepared by sol-gel process followed by laser irradiation treatment. / Tsang, W. M.; Wong, F. L.; Fung, M. K.; Chang, J. C.; Lee, C. S.; Lee, S. T.

In: Thin Solid Films, Vol. 517, No. 2, 28.11.2008, p. 891-895.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal