Abstract
This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane. Copyright © 2010 American Scientific Publishers.
| Original language | English |
|---|---|
| Pages (from-to) | 7533-7536 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 10 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - Nov 2010 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
-
SDG 9 Industry, Innovation, and Infrastructure
Fingerprint
Dive into the research topics of 'Transduction dependent optimization of electromechanical parameters for electrostatically actuated MEMS/NEMS resonators'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver