TY - JOUR
T1 - Transduction dependent optimization of electromechanical parameters for electrostatically actuated MEMS/NEMS resonators
AU - Yanh, Jize
AU - Lee, Joshua E.-Y.
AU - Seshia, Ashwin A.
PY - 2010/11
Y1 - 2010/11
N2 - This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane. Copyright © 2010 American Scientific Publishers.
AB - This paper demonstrates an accurate model to predict the overall effective mass in micro- and nanomechanical resonators with non-uniform deformation along the transduction area. The model is verified experimentally through parameter extraction on various types of resonators with an error less than 3% well within the bounds dictated by manufacturing tolerances. Based on the model, an optimization of transduction electrode designs is proposed for micro- and nanomechanical resonators vibrating in the fabrication plane. Copyright © 2010 American Scientific Publishers.
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U2 - 10.1166/jnn.2010.2801
DO - 10.1166/jnn.2010.2801
M3 - RGC 21 - Publication in refereed journal
SN - 1533-4880
VL - 10
SP - 7533
EP - 7536
JO - Journal of Nanoscience and Nanotechnology
JF - Journal of Nanoscience and Nanotechnology
IS - 11
ER -
