Tracking Control of Nanopositioning Stages Using Parallel Resonant Controllers for High-Speed Nonraster Sequential Scanning

Yidan Tao, Zhiwei Zhu, Qingsong Xu, Han-Xiong Li, LiMin Zhu*

*Corresponding author for this work

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    16 Citations (Scopus)

    Abstract

    The resonant controller (RC), as a promising candidate for high-speed nonraster nanopositioning applications, can track the sinusoidal reference with zero steady-state error. This article presents a controller composed of several RCs in parallel for tracking nonraster sequential scanning trajectories. The selection for each RC in the parallel array is based on two considerations: one is the spectrum of the reference signal and the other is the harmonics caused by the nonlinearities of the nanopositioning stage. The performance of RC is highly dependent on the accurate placement of the resonant poles, but unfortunately, many existing digital implementation methods could cause a deviation of the resonant poles from their initial locations. To address this problem, a modified Tustin (MTus) method is proposed in this article to implement the controller with better accuracy. Furthermore, the fractional-order (FO) calculus is introduced to improve the transient performance of the RCs. To validate the proposed methods, a comprehensive examination of several types of the nonraster sequential scanning trajectories with a wide frequency range has been carried out on a nanopositioning stage. The results have been compared with other methods, showing that the tracking errors are reduced significantly under the controller implemented by the MTus method especially in high-frequency conditions and that the application of the FO calculus reduces the settling time of the controller by more than 30% in most cases.
    Original languageEnglish
    Pages (from-to)1218-1228
    Number of pages11
    JournalIEEE Transactions on Automation Science and Engineering
    Volume18
    Issue number3
    Online published9 Jun 2020
    DOIs
    Publication statusPublished - Jul 2021

    Research Keywords

    • Digital implementation
    • fractional-order (FO) calculus
    • high-speed nonraster sequential scanning
    • resonant controller (RC)

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