Towards High Resolution Pico-Projector Applications : Design Improvements on MEMS Scanning Mirror

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

2 Scopus Citations
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Author(s)

  • Wei Ma
  • Chun Cheong Wong
  • Checky Yiu
  • Yick Chuen Chan
  • Francis Chee Shuen Lee

Detail(s)

Original languageEnglish
Title of host publicationProceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PublisherIEEE
Pages831-834
ISBN (Electronic)9781612847771
ISBN (Print)9781612847757
Publication statusPublished - Feb 2011
Externally publishedYes

Publication series

NameIEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
PublisherIEEE

Conference

Title6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
PlaceTaiwan
CityKaohsiung
Period20 - 23 February 2011

Abstract

Design and implementation of a micro scanning mirror for the application of WVGA resolution (848×480) pico-projector display is presently reported. A FEM model for damping coefficient analysis is built and shows a good agreement with experiment result. In addition, stress study for the torsional bar is performed to deal with fracture issue. With the consideration on damping coefficient and stress in torsional bar, the new designed and implemented micro scanning mirror has shown to have a > 6° scanning angle at 21kHz resonant frequency.

Research Area(s)

  • damping coefficient, maximum stress, pico- projector, scanning mirror, WVGA resolution

Citation Format(s)

Towards High Resolution Pico-Projector Applications : Design Improvements on MEMS Scanning Mirror. / Ma, Wei; Chan, Ho-Yin; Wong, Chun Cheong; Yiu, Checky; Chan, Yick Chuen; Lee, Francis Chee Shuen.

Proceedings of the 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. IEEE, 2011. p. 831-834 6017482 (IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review