Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation

King W. C. Lai; Carmen K. M. Fung; Selina C. Qu; K. F. Lei; Wen J. Li

doi:10.1109/ROBIO.2004.1521854

Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation

King W. C. Lai, Carmen K. M. Fung, Selina C. Qu, K. F. Lei, Wen J. Li^*

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

1 Citation (Scopus)

Abstract

We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼μW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ∼200μm. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices. © 2004 IEEE.

Original language	English
Title of host publication	Proceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004
Publisher	IEEE
Pages	634-639
ISBN (Electronic)	9780780386419
ISBN (Print)	0-7803-8614-8
DOIs	https://doi.org/10.1109/ROBIO.2004.1521854
Publication status	Published - Aug 2004
Externally published	Yes
Event	2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004) - Shenyang, China Duration: 22 Aug 2004 → 26 Aug 2004

Conference

Conference	2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004)
Place	China
City	Shenyang
Period	22/08/04 → 26/08/04

Research Keywords

AC electrophoretic manipulation
Carbon nanotube
CNT sensors
Microinjection
Nano batch fabrication

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@inproceedings{d62bd959823348c2a480bad66295036f,

title = "Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation",

abstract = "We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼μW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ∼200μm. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices. {\textcopyright} 2004 IEEE.",

keywords = "AC electrophoretic manipulation, Carbon nanotube, CNT sensors, Microinjection, Nano batch fabrication",

author = "Lai, {King W. C.} and Fung, {Carmen K. M.} and Qu, {Selina C.} and Lei, {K. F.} and Li, {Wen J.}",

year = "2004",

month = aug,

doi = "10.1109/ROBIO.2004.1521854",

language = "English",

isbn = "0-7803-8614-8",

pages = "634--639",

booktitle = "Proceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004",

publisher = "IEEE",

address = "United States",

note = "2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004) ; Conference date: 22-08-2004 Through 26-08-2004",

}

Lai, KWC, Fung, CKM, Qu, SC, Lei, KF & Li, WJ 2004, Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation. in Proceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004. IEEE, pp. 634-639, 2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004), Shenyang, China, 22/08/04. https://doi.org/10.1109/ROBIO.2004.1521854

Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation. / Lai, King W. C.; Fung, Carmen K. M.; Qu, Selina C. et al.
Proceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004. IEEE, 2004. p. 634-639.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation

AU - Lai, King W. C.

AU - Fung, Carmen K. M.

AU - Qu, Selina C.

AU - Lei, K. F.

AU - Li, Wen J.

PY - 2004/8

Y1 - 2004/8

N2 - We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼μW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ∼200μm. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices. © 2004 IEEE.

AB - We present the preliminary design and test results of a novel automated Carbon Nanotube (CNT) microinjection system for batch fabrication of a bulk multi-walled carbon nanotubes (MWNT) based sensors. This project will eventually develop an automated system to rapidly and precisely execute the AC electrophoretic manipulation of MWNT bundles on substrates that are used to fabricate nano-sensors. We have already shown that, using dielectrophoretic manipulation, CNTs were successfully and repeatably manipulated between micro-fabricated electrodes. The CNT devices were demonstrated to potentially serve as novel thermal sensors with low power consumption (∼μW) and electronic circuit response of about 100 kHz in constant current mode operation. Besides, preliminary microinjection experiments were conducted which demonstrated the possibility of the automated microinjection of solution with spot size of ∼200μm. Based on these experimental evidences, a feasible batch fabrication method for functional CNT sensors by using an automated injection system is under development. The system will ultimately reduce fabrication accuracy and time of nano sensing devices and potentially enable fully automated assembly of CNT and other nano-wire based devices. © 2004 IEEE.

KW - AC electrophoretic manipulation

KW - Carbon nanotube

KW - CNT sensors

KW - Microinjection

KW - Nano batch fabrication

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DO - 10.1109/ROBIO.2004.1521854

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-8614-8

SP - 634

EP - 639

BT - Proceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004

PB - IEEE

T2 - 2004 IEEE International Conference on Robotics and Biomimetics (ROBIO 2004)

Y2 - 22 August 2004 through 26 August 2004

ER -

Towards batch fabrication of carbon nanotube sensors by combining microinjection and dielectrophoretic manipulation

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