Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Y. J. Chen
  • I. H. Wilson
  • C. S. Lee
  • J. B. Xu
  • M. L. Yu

Detail(s)

Original languageEnglish
Pages (from-to)5859-5861
Journal / PublicationJournal of Applied Physics
Volume82
Issue number11
Publication statusPublished - 1 Dec 1997
Externally publishedYes

Abstract

In this communication, we present a study of tip artifacts in atomic force microscope images of nanometer-scale cellular structures created on germanium surfaces by ion bombardment. It is demonstrated that the appearance of a columnar/granular morphology is due to severe image distortion when the tip size is comparable with the mean cell/hole diameter. These tip artifacts can often be deconvoluted by inverting the image and the lateral extension of the cell/hole can be reproduced with reasonable accuracy. ©1997 American Institute of Physics.

Citation Format(s)

Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces. / Chen, Y. J.; Wilson, I. H.; Lee, C. S. et al.
In: Journal of Applied Physics, Vol. 82, No. 11, 01.12.1997, p. 5859-5861.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review