Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces

Y. J. Chen; I. H. Wilson; C. S. Lee; J. B. Xu; M. L. Yu

doi:10.1063/1.366454

Author(s)

Y. J. Chen
I. H. Wilson
C. S. Lee
J. B. Xu
M. L. Yu

Detail(s)

Original language	English
Pages (from-to)	5859-5861
Journal / Publication	Journal of Applied Physics
Volume	82
Issue number	11
Publication status	Published - 1 Dec 1997
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1063/1.366454 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-0347142111&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(c7f082b7-b5ee-42d5-8c03-d9f62dc9a091).html

Abstract

In this communication, we present a study of tip artifacts in atomic force microscope images of nanometer-scale cellular structures created on germanium surfaces by ion bombardment. It is demonstrated that the appearance of a columnar/granular morphology is due to severe image distortion when the tip size is comparable with the mean cell/hole diameter. These tip artifacts can often be deconvoluted by inverting the image and the lateral extension of the cell/hole can be reproduced with reasonable accuracy. ©1997 American Institute of Physics.

Citation Format(s)

[ RIS ] [ BibTeX ]

Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces. / Chen, Y. J.; Wilson, I. H.; Lee, C. S. et al.
In: Journal of Applied Physics, Vol. 82, No. 11, 01.12.1997, p. 5859-5861.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Chen, YJ, Wilson, IH, Lee, CS, Xu, JB & Yu, ML 1997, 'Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces', Journal of Applied Physics, vol. 82, no. 11, pp. 5859-5861. https://doi.org/10.1063/1.366454

Chen, Y. J., Wilson, I. H., Lee, C. S., Xu, J. B., & Yu, M. L. (1997). Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces. Journal of Applied Physics, 82(11), 5859-5861. https://doi.org/10.1063/1.366454

Chen YJ, Wilson IH, Lee CS, Xu JB, Yu ML. Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces. Journal of Applied Physics. 1997 Dec 1;82(11):5859-5861. doi: 10.1063/1.366454

Chen, Y. J. ; Wilson, I. H. ; Lee, C. S. et al. / Tip artifacts in atomic force microscope imaging of ion bombarded nanostructures on germanium surfaces. In: Journal of Applied Physics. 1997 ; Vol. 82, No. 11. pp. 5859-5861.