TY - GEN
T1 - Ti-Al-Si-C-N hard coatings synthesized by hybrid arc enhanced magnetron sputtering
AU - Wu, Guizhi
AU - Liu, Sitao
AU - Ma, Shengli
AU - Xu, Kewei
AU - Ji, Vincent
AU - Chu, Paul K
PY - 2010
Y1 - 2010
N2 - Ti-Al-Si-C-N coatings are deposited by hybrid arc-enhanced magnetic sputtering and characterized by various micro- And macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-Si3N4/a-C depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle indicating compressive stress in the coatings. The measured hardness also diminishes implying reduced contributions from the self-organized stable nanostructure. The dry friction coefficients of the Ti-Al-Si-C-N coatings are found to be about 0.3 which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring high temperature with heavy contact loading.
AB - Ti-Al-Si-C-N coatings are deposited by hybrid arc-enhanced magnetic sputtering and characterized by various micro- And macro-tools. X-ray diffraction, high-resolution transmission electron microscopy, and X-ray photoelectron spectroscopy reveal that the coatings are nanocomposites consisting of nanocrystallites and amorphous phases. They are generally in the form of nc-(Ti,Al)(C,N)/a-Si3N4/a-C depending on the composition of the coatings. With increasing Al concentrations, the X-ray diffraction peaks shift to a lower angle indicating compressive stress in the coatings. The measured hardness also diminishes implying reduced contributions from the self-organized stable nanostructure. The dry friction coefficients of the Ti-Al-Si-C-N coatings are found to be about 0.3 which is lower than that of conventional Ti-Si-N coatings. These coatings can find potential applications requiring high temperature with heavy contact loading.
KW - Friction
KW - Hardness
KW - Nanostructure
KW - Ti-Al-Si-C-N coatings
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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84893325512&origin=recordpage
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 9781617820168
VL - 6
SP - 4591
EP - 4600
BT - 65th ABM International Congress, 18th IFHTSE Congress and 1st TMS/ABM International Materials Congress 2010
T2 - 65th ABM International Congress, 18th IFHTSE Congress and 1st TMS/ABM International Materials Congress 2010
Y2 - 26 July 2010 through 30 July 2010
ER -