Three-dimensional quantitative chemical roughness of buried ZrO2/In2O3 interfaces via energy-filtered electron tomography

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • B. Kabius
  • D. K. Schreiber
  • J. A. Eastman
  • D. D. Fong
  • A. K. Petford-Long

Detail(s)

Original languageEnglish
Article number101604
Journal / PublicationApplied Physics Letters
Volume100
Issue number10
Publication statusPublished - 5 Mar 2012
Externally publishedYes

Abstract

The protocol to calculate the chemical roughness from three-dimensional (3-D) data cube acquired by energy-filtered electron tomography has been developed and applied to analyze the 3-D Zr distribution at the arbitrarily shaped interfaces in the ZrO2/In2O3 multilayer films. The calculated root-mean-square roughness quantitatively revealed the chemical roughness at the buried ZrO2/In2O3 interfaces, which is the deviation of Zr distribution from the ideal flat interface. Knowledge of the chemistry and structure of oxide interfaces in 3-D provides information useful for understanding changes in the behavior of a model ZrO2/In2O3 heterostructure that has potential to exhibit mixed conduction behavior. © 2012 American Institute of Physics.

Citation Format(s)

Three-dimensional quantitative chemical roughness of buried ZrO2/In2O3 interfaces via energy-filtered electron tomography. / Zhong, X. Y.; Kabius, B.; Schreiber, D. K.; Eastman, J. A.; Fong, D. D.; Petford-Long, A. K.

In: Applied Physics Letters, Vol. 100, No. 10, 101604, 05.03.2012.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review