Three-dimensional nanochannels formed by fast etching of polymer

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Oxide Compound Material Science
100
Polymers Material Science
50
Temperature Material Science
33
Dry Etching Material Science
33
Lithography Material Science
33
Nanostructure Material Science
16
Coating Material Science
16
Reactive Ion Etchin... Material Science
16
DNA Material Science
16
Surface (Surface Sc... Material Science
16
Nanofluidics Material Science

Keyphrases

100
Three-dimensional (... Keyphrases
100
Nanochannel Keyphrases
71
Etching Rate Keyphrases
57
Oxides Keyphrases
28
Etching Process Keyphrases
28
Dry Etching Keyphrases
28
Multiple Levels Keyphrases
28
Sacrificial Polymer Keyphrases
14
Si Substrate Keyphrases
14
High Selectivity Keyphrases
14
Order of Magnitude Keyphrases
14
Photoresist Keyphrases
14
Elevated Temperatur... Keyphrases
14
Three-dimensional S... Keyphrases
14
O2 Plasma Keyphrases
14
Rate of Increase Keyphrases
14
Visible Light Keyphrases
14
Pressure-temperatur... Keyphrases
14
Two-level Keyphrases
14
Reactive Ion Etchin... Keyphrases
14
Biomedical Applicat... Keyphrases
14
High Power Keyphrases
14
Planarization Keyphrases
14
Formation Process Keyphrases
14
Rate Dependence Keyphrases
14
High Pressure High ... Keyphrases
14
Channel Structure Keyphrases
14
Etch Back Keyphrases
14
Hydrophilic Surface Keyphrases
14
Nanoimprint Lithogr... Keyphrases
14
Channel Width Keyphrases
14
Channel Formation Keyphrases
14
3D Nanostructure Keyphrases
14
Biomolecule Detecti... Keyphrases
14
Adjacent Level Keyphrases
14
Sacrificial Oxide Keyphrases
14
Nanofluidic System Keyphrases
14
Oxide Deposition Keyphrases
14
DNA Analysis Keyphrases
14
Optical Lithography Keyphrases
14
Polymer Nanostructu... Keyphrases
14
Biomedical Studies Keyphrases
14
Pressure Channel Keyphrases

INIS

100
etching INIS
100
oxides INIS
100
polymers INIS
66
levels INIS
33
nanostructures INIS
16
speed INIS
16
detection INIS
16
substrates INIS
16
surfaces INIS
16
width INIS
16
deposition INIS
16
coatings INIS
16
applications INIS
16
power INIS
16
ions INIS
16
plasma INIS
16
dna INIS
16
high pressure INIS
16
coverings INIS
16
nanofluidics INIS

Engineering

100
Polymers Engineering
83
Etch Rate Engineering
33
Dry Etching Engineering
33
Nanomaterial Engineering
33
Temperature Engineering
33
Surface Pressure Engineering
16
Elevated Temperatur... Engineering
16
High Selectivity Engineering
16
Si Substrate Engineering
16
High Speed Engineering
16
High Pressure Engineering
16
Dimensional System Engineering
16
Interconnects Engineering
16
Rate Increase Engineering
16
Rate Dependence Engineering
16
Biomedical Applicat... Engineering
16
Planarization Engineering
16
Photoresist Engineering
16
Channel Structure Engineering
16
Optical Lithography Engineering
16
Hydrophilic Surface Engineering
16
Biomolecule Engineering
16
Nanoimprint Lithogr... Engineering
16
Nanofluidics Engineering
16
Detection Engineering
Research OutputsResearch Output authored by Three-dimensional nanochannels formed by fast etching of polymer is tagged with the concept