Three-Dimensional Nanoimprint for Meta Devices, Terahertz Devices, and Biosensors

The development of advanced meta devices, terahertz (THz) devices, and biosensors relies heavily on innovative nanotechnology. Our pioneering work in nanoimprint technology enables the fabrication of three-dimensional (3D) nanodevices with multiple layers and specialized functions, ensuring high-speed production, uniformity, and precise dimensional control across large areas. By adjusting the surface energy of stamps and imprinted materials, we have developed both direct and reversal nanoimprint technology. Reversal nanoimprint allows 3D devices to be built up by stacking multiple layers together. This presentation will highlight nanoimprinted meta-surfaces that form twisted layers, achieving chiral magic angles for sophisticated light manipulation. Additionally, we will demonstrate high-frequency THz lenses and antennas with multiple-beam control using curved or meta-surfaces. Furthermore, 3D biomimetic platforms and plasmonic biosensors will be showcased, offering high sensitivity for monitoring and controlling cells and biomolecules. These nanostructured platforms are crucial for influencing cell migration and distinguishing cancerous cells from healthy ones.