Third-harmonic generation in CMOS-compatible highly doped silica micro-ring resonator

We present the first demonstration of visible emission from highly doped silica glass micro-ring resonators (MRRs) through a third-harmonic generation (THG) nonlinear process. We obtain green light conversion efficiency of 2.7×10⁻⁵ W⁻² in a MRR with loaded Q-factor of 1.4×10⁶ pumped in the telecom band. A thermal nonlinear model is developed to account for the in-cavity power dependence of the resonance detuning. Using the extracted thermal nonlinear coefficients, the measured TH resonance shift is calibrated by subtracting the thermal nonlinear-induced phase mismatch to obtain the theoretical threefold wavelength relationship along with the measured cubic power relationship.