Thickness uniformity and surface morphology of Fe, Ti, and Hf films produced by filtered pulsed cathodic arc deposition

L. H. Li, Q. Y. Lu, Ricky K.Y. Fu, Paul K. Chu

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    4 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Thickness uniformity and surface morphology of Fe, Ti, and Hf films produced by filtered pulsed cathodic arc deposition'. Together they form a unique fingerprint.

    Engineering

    Material Science

    Agricultural and Biological Sciences