Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films

Shengbo Lu; Zhenkui Xu; Jiwei Zhai

doi:10.1016/j.tsf.2010.05.091

Author(s)

Shengbo Lu
Zhenkui Xu
Jiwei Zhai

Detail(s)

Original language	English
Pages (from-to)	5928-5931
Journal / Publication	Thin Solid Films
Volume	518
Issue number	21
Publication status	Published - 31 Aug 2010

Link(s)

DOI	DOI https://doi.org/10.1016/j.tsf.2010.05.091 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-77955557541&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(5b4b7727-cf3b-4f65-9b31-c308766dca41).html

Abstract

Highly (001) oriented (Ba,Sr)TiO₃ thin films, grown on (001) LaAlO₃ substrates by pulsed laser deposition, exhibit strong variation of strain over the thickness range of 20-800 nm. The tensile elastic residual strain reaches a minimum value at a thickness of 250 nm, while the inhomogeneous strain decreases gradually with increasing film thickness. The 250-nm-thick film has the largest in-plane dielectric constant due to a smallest tensile elastic strain in the film and the largest in-plane tunability of 40% is achieved in the thickest film. © 2010 Elsevier B.V. All rights reserved.

Research Area(s)

Barium Strontium Titanate, In plane dielectric properties, Pulse laser deposition, Strain, Thin films, X-ray diffraction

Citation Format(s)

[ RIS ] [ BibTeX ]

Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films. / Lu, Shengbo; Xu, Zhenkui; Zhai, Jiwei.

In: Thin Solid Films, Vol. 518, No. 21, 31.08.2010, p. 5928-5931.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

Lu, S, Xu, Z & Zhai, J 2010, 'Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films', Thin Solid Films, vol. 518, no. 21, pp. 5928-5931. https://doi.org/10.1016/j.tsf.2010.05.091

Lu, S., Xu, Z., & Zhai, J. (2010). Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films. Thin Solid Films, 518(21), 5928-5931. https://doi.org/10.1016/j.tsf.2010.05.091

Lu S, Xu Z, Zhai J. Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films. Thin Solid Films. 2010 Aug 31;518(21):5928-5931. https://doi.org/10.1016/j.tsf.2010.05.091

Lu, Shengbo ; Xu, Zhenkui ; Zhai, Jiwei. / Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films. In: Thin Solid Films. 2010 ; Vol. 518, No. 21. pp. 5928-5931.