Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

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Author(s)

  • Shengbo Lu
  • Zhenkui Xu
  • Jiwei Zhai

Detail(s)

Original languageEnglish
Pages (from-to)5928-5931
Journal / PublicationThin Solid Films
Volume518
Issue number21
Publication statusPublished - 31 Aug 2010

Abstract

Highly (001) oriented (Ba,Sr)TiO3 thin films, grown on (001) LaAlO3 substrates by pulsed laser deposition, exhibit strong variation of strain over the thickness range of 20-800 nm. The tensile elastic residual strain reaches a minimum value at a thickness of 250 nm, while the inhomogeneous strain decreases gradually with increasing film thickness. The 250-nm-thick film has the largest in-plane dielectric constant due to a smallest tensile elastic strain in the film and the largest in-plane tunability of 40% is achieved in the thickest film. © 2010 Elsevier B.V. All rights reserved.

Research Area(s)

  • Barium Strontium Titanate, In plane dielectric properties, Pulse laser deposition, Strain, Thin films, X-ray diffraction