Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
Author(s)
Detail(s)
Original language | English |
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Pages (from-to) | 5928-5931 |
Journal / Publication | Thin Solid Films |
Volume | 518 |
Issue number | 21 |
Publication status | Published - 31 Aug 2010 |
Link(s)
Abstract
Highly (001) oriented (Ba,Sr)TiO3 thin films, grown on (001) LaAlO3 substrates by pulsed laser deposition, exhibit strong variation of strain over the thickness range of 20-800 nm. The tensile elastic residual strain reaches a minimum value at a thickness of 250 nm, while the inhomogeneous strain decreases gradually with increasing film thickness. The 250-nm-thick film has the largest in-plane dielectric constant due to a smallest tensile elastic strain in the film and the largest in-plane tunability of 40% is achieved in the thickest film. © 2010 Elsevier B.V. All rights reserved.
Research Area(s)
- Barium Strontium Titanate, In plane dielectric properties, Pulse laser deposition, Strain, Thin films, X-ray diffraction
Citation Format(s)
Thickness dependence of strain and in-plane dielectric properties of highly (001) oriented (Ba,Sr)TiO3 thin films. / Lu, Shengbo; Xu, Zhenkui; Zhai, Jiwei.
In: Thin Solid Films, Vol. 518, No. 21, 31.08.2010, p. 5928-5931.Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review