Thickness dependence of morphology and mechanical properties of on-wafer low-k PTFE dielectric films

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Detail(s)

Original languageEnglish
Pages (from-to)413-417
Journal / PublicationThin Solid Films
Volume377-378
Publication statusPublished - 1 Dec 2000
Externally publishedYes

Abstract

The structure and morphology of on-wafer low-k ultrathin dielectric polytetrafluoroethylene (PTFE) films have been investigated using X-ray diffraction (XRD), polarized optical microscopy (POM) and scanning electron microscopy (SEM). The morphology observed by POM and SEM is found to be thickness-dependent; the characters of spherulite and lamella morphologies became mature gradually with increasing thickness. A similar thickness dependence of spherulitic and lamellar morphologies is found. The thickness-dependent Young's modulus and hardness obtained by the dynamic contact module (DCM) in a unique frequency-specific depth-sensing indentation can be explained by the observed thickness dependence of morphology.

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Citation Format(s)

Thickness dependence of morphology and mechanical properties of on-wafer low-k PTFE dielectric films. / Wang, Jinguo; Kim, H.K; Shi, Frank G.; Zhao, Bin; Nieh, T. G.

In: Thin Solid Films, Vol. 377-378, 01.12.2000, p. 413-417.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review