Thick magnesium films produced by deposition techniques

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)525-534
Journal / PublicationThin Solid Films
Volume152
Issue number3
Publication statusPublished - 28 Sep 1987
Externally publishedYes

Abstract

Thick magnesium alloy films were prepared by both vapor deposition and sputter deposition techniques. It was found that the properties of the deposited films depend on the substrate material, deposition temperature and release agent, as well as substrate motion. Processing parameters were related to the physical integrity of the deposited film. A direct comparison between an alloy film produced by vapor deposition and an alloy film produced by sputter deposition was also made. It is concluded that sputter deposition is superior to vapor deposition, as the former method can produce a film not only more uniform in thickness, but also with much closer control of chemical composition. © 1987.

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Citation Format(s)

Thick magnesium films produced by deposition techniques. / Nieh, T. G.; Wadsworth, J.

In: Thin Solid Films, Vol. 152, No. 3, 28.09.1987, p. 525-534.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review