Thermal Stability of Metal-Doped Diamond-like-Carbon Thin Films Fabricated by Dual Plasma Deposition

Ricky K. Y. Fu; Y. F. Mei; M. Y. Fu; C. B. Wei; G. G. Siu; Paul K. Chu; W. Y. Cheung; S. P. Wong

Thermal Stability of Metal-Doped Diamond-like-Carbon Thin Films Fabricated by Dual Plasma Deposition

Ricky K. Y. Fu
, Y. F. Mei
, M. Y. Fu
, C. B. Wei
, G. G. Siu
, Paul K. Chu
, W. Y. Cheung
, S. P. Wong

Research output: Conference Papers › RGC 31A - Invited conference paper (refereed items) › Yes › peer-review

Original language	English
Publication status	Published - May 2004
Event	5th International Conference on Thin Films Physics and Application (TFPA 2004) - Shanghai, China Duration: 31 May 2004 → 2 Jun 2004

Conference

Conference	5th International Conference on Thin Films Physics and Application (TFPA 2004)
Abbreviated title	TFPA 2004
Place	China
City	Shanghai
Period	31/05/04 → 2/06/04

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@conference{3fcc4ad4024c4ec3b36e2dc05a5aac63,

title = "Thermal Stability of Metal-Doped Diamond-like-Carbon Thin Films Fabricated by Dual Plasma Deposition",

author = "Fu, \{Ricky K. Y.\} and Mei, \{Y. F.\} and Fu, \{M. Y.\} and Wei, \{C. B.\} and Siu, \{G. G.\} and Chu, \{Paul K.\} and Cheung, \{W. Y.\} and Wong, \{S. P.\}",

year = "2004",

month = may,

language = "English",

note = "5th International Conference on <b>Thin Films Physics and Application</b> (TFPA 2004), TFPA 2004 ; Conference date: 31-05-2004 Through 02-06-2004",

}

TY - CONF

T1 - Thermal Stability of Metal-Doped Diamond-like-Carbon Thin Films Fabricated by Dual Plasma Deposition

AU - Fu, Ricky K. Y.

AU - Mei, Y. F.

AU - Fu, M. Y.

AU - Wei, C. B.

AU - Siu, G. G.

AU - Chu, Paul K.

AU - Cheung, W. Y.

AU - Wong, S. P.

PY - 2004/5

Y1 - 2004/5

M3 - RGC 31A - Invited conference paper (refereed items)

T2 - 5th International Conference on <b>Thin Films Physics and Application</b> (TFPA 2004)

Y2 - 31 May 2004 through 2 June 2004

ER -