TiN 覆盖层和 Co/Ti/Si 三元固相反应改善超薄 CoSi2 高温稳定性

Thermal stability improvement of ultrathin CoSi2 film formed by TiN capping layer and Co/Ti/Si ternary solid phase reaction

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Engineering & Materials Science

Research OutputsResearch Output authored by TiN 覆盖层和 Co/Ti/Si 三元固相反应改善超薄 CoSi2 高温稳定性 is tagged with the concept