Theoretical investigation of the effects of AC applied voltage on film unformity in dual plasma deposition

Research output: Journal Publications and Reviews › RGC 22 - Publication in policy or professional journal

Overview

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Engineering

Applied Voltage Engineering

Theoretical Investi... Engineering

Plasma Density Engineering

Thin Films Engineering

Plasma Source Engineering

Arc Plasma Engineering

Pulse Duration Engineering

Simulation Result Engineering

Radial Direction Engineering

Positive Voltage Engineering

Deposited Film Engineering

Axial Direction Engineering

Axial Velocity Engineering

Physics

Blood Plasma Physics

Plasma Density Physics

Thin Films Physics

Plasma Jet Physics

Radial-Velocity Met... Physics

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