The variation of the leakage current characteristics of W/Ta2O5/W MIM capacitors with the thickness of the bottom W electrode
- D.Q. Yu
- , W.S. Lau*
- , Hei Wong
- , Xuan Feng
- , Shurong Dong
- , K.L. Pey
*Corresponding author for this work
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
14
Link opens in a new tab
Citations
(Scopus)